Semiconductor device having plural dram memory cells and a logic circuit and method for manufacturing the same

ABSTRACT

A memory cell capacitor (C 3 ) of a DRAM is formed by use of a MIM capacitor which uses as its electrode a metal wiring line of the same layer (M 3 ) as metal wiring lines within a logic circuit (LOGIC), thereby enabling reduction of process costs. Higher integration is achievable by forming the capacitor using a high dielectric constant material and disposing it above a wiring layer in which bit lines (BL) are formed. In addition, using 2T cells makes it possible to provide a sufficient signal amount even when letting them operate with a low voltage. By commonizing the processes for fabricating capacitors in analog (ANALOG) and memory (MEM), it is possible to realize a semiconductor integrated circuit with the logic, analog and memory mounted together on one chip at low costs.

The present application is a divisional application of application Ser.No. 12/213,920, filed Jun. 26, 2008, which is a divisional applicationof application Ser. No. 10/488,401, filed Mar. 3, 2004 (now U.S. Pat.No. 7,408,218), the contents of all of which are incorporated herein byreference.

TECHNICAL FIELD

The present invention relates to a semiconductor device and amanufacturing method thereof. In particular, the invention relates to asemiconductor device preferably adaptable for use in applications underhigh speed, high integration, and low power requirements.

BACKGROUND ART

The quest for higher functionality and higher performance is growingrapidly in a variety of types of information equipment including, butnot limited to, mobile tools such as cellular phones, multimediainstruments such as game machines, personal computers or equivalentsthereto. Under such circumstances, integrated circuits (referred to asLSI hereinafter) making up these apparatuses are more strictly requiredto offer higher performances in near feature, in terms of highintegration, high-speed operability, low power and low cost.

It is the on-chip memory that attracts attention as one of thetechniques for fulfilling this requirement. The on-chip memory as usedherein refers to a memory device (simply called the memory hereafter)which integrates its memory part together with a logic circuit on an LSIchip. When compared to the case where the memory is designed in the formof a single separate LSI chip, it has been known that the onchip memoryoffers advantages which follow: improvements in LSI mount density owingto a decrease in number of chips, and high-speed/low-power operabilitydue to data transmission on an LSI chip.

Presently main current memory cells for the onchip memory use are staticrandom access memory (abbreviated as SRAM hereinafter) cells. In theSRAM cells, a cell which is made up of six transistors (referred tohereafter as 6T cell) is used in most cases. Other known cells include adynamic type memory cell consisting of one transistor and one capacitor(noted as 1T1C cell hereafter). Memory cells of this type involveseveral types of known ones different in capacitor structure. Arepresentative one is a memory cell that utilizes a capacitor having a3D structure. Known examples of this are the trench type with acapacitor formed in a silicon substrate and the stack type with acapacitor separated from a substrate and formed thereover. An example ofthe former is recited in FIG. 7 on page 61 of “SPECTRUM” issued by theIEEE-USA, April, 1999. An example of the latter is found in thecollection of draft papers of “1999 VLSI Technology Short Course” issuedby IEEE-USA, page 90, FIG. 30. Additionally, as a different example fromthem, an exemplary 1T1C memory cell using a planar MOS capacitor isrecited in FIG. 3 of U.S. Pat. No. 6,075,720. Furthermore, cells otherthan the 6T and 1T1C cells are also known. For example, in JP-A-5-291534and U.S. Pat. No. 5,357,460, a cell is described which utilizes twotransistors and one or two capacitors (referred to as 2T1C cell, 2T2Ccell hereinafter). In addition, JP-A-9-12070 discloses therein aferroelectric memory device with the switchability of 1T1C and 2T2Ccells.

The 6T cell is structured from transistors only so that there is anadvantage that additional steps with respect to the process forfabricating logic transistors are less in number. However, the cell areais large so that the capacity of a memory mountable on one LSI chip islimited. In contrast, the 1T1C cell is less in area than the 6T cell.Especially in those cells of the stack type and the trench type using 3Dstructured capacitors, it is possible to realize areas of about ⅛ orless than that of 6T cell. However, this results in an increase inprocess steps for fabrication of 3D structured capacitors; thus, thereis a disadvantage that the cost becomes higher.

In the 1T1C cell using a MOS capacitor which is one of the above-notedprior known examples, the problem as to an increase in process step isavoidable because it is possible to fabricate capacitors at the samestep as that for forming logic transistors. Obviously, memory celltransistors and capacitors are laid out side by side, and the capacitorshape also is planar; thus, it is said that a highly integrated on-chipmemory is realizable when compared to 6T cells, although this cell isless in integration than the stack and trench cells.

In prior art on-chip memories having more than one capacitor, these staymerely at a level of technology which simplifies the manufacturingprocedure by separately performing processes of a memory unit and alogic circuit unit or by simultaneously performing any sharableprocesses. For example, in JP-A-11-251647, a trench capacitor is used,which is a process unique to DRAMs.

In the circumstances stated above, a first goal or issue to be attainedby the present invention is to realize an on-chip memory having acapacitor which takes advantage of the CMOS process of logic circuitryto thereby provide an onchip memory which highly satisfies theconflicting requirements for process cost reduction and integration.Furthermore, a second issue is to enable achievement of a low-voltageoperation with 1V or below in the above-noted onchip memory. Inaddition, a third issue is to realize an on-chip memory suitable alsofor co-integration with not only digital logic circuitry but also analogcircuitry. The first issue is deemed problematical even at the presenttime as described in the explanation of the prior art. And, the secondand third issues are the ones that are expected to become important inthe near future. The second and third issues will be explained below.

As well known, the supply voltage of LSIs is potentially lowered perprocess generation for purposes of miniaturization of circuit elementsand achievement of low power operability. In logic LSIs, products of1.5V or less have already been available in the marketplace. The questfor lower voltage is expected to further advance from now on, which inturn requires the on-chip memory also to operate with 1V or lowervoltages. This can be said because if the memory unit fails to offerlow-voltage operability then it becomes a must to supply differentvoltages to the logic unit and the memory unit, resulting inincapability to further lower the power consumption of the memory unit.Unfortunately, an operation at low voltages would result in occurrenceof various problems. For instance, as well known, the amount of a readsignal of a 1T1C cell is proportional to the power supply voltage.Accordingly, when reducing the operating voltage, it becomes difficultto acquire the read signal amount. To avoid this, it is required tolessen the number of memory cells on a bit line to thereby reduce thebitline capacitance or, alternatively, to enlarge the size of acapacitor to thereby increase the capacitance of such capacitor.However, any one of the both results in an increase in area, whichspoils the high integrability. In addition, the operation of a senseamplifier also becomes difficult. In particular, with the prior artconfiguration, the operation at a voltage of about 1V or less isunrealistic. Accordingly, it is an important matter in the future toachieve a highly integrated onchip memory with low-voltage operability.

Additionally, the third issue will become important in the future bytaking account of the following circumstance. As known under the name of“system-on-chip,” the circuitry to be integrated on an LSI increases inscale. For example, as suggested in JP-A-11-2511647 andJP-A-2001-196561, it is no longer uncommon that analog and digitalcircuits are integrated together. While transistors are used in digitalcircuit, the analog circuit requires the use of certain circuit elementssuch as capacitors in addition thereto. Therefore, in the case ofintegrating an onchip memory of large capacity together with alarge-scale digital circuit and analog circuit, various kinds offabrication steps are added, resulting in occurrence of anxiety as to anincrease in manufacturing process cost. Another anxiety lies in adecrease in performance, reliability or manufacturing yield due to thecombination of different kinds of processes.

DISCLOSURE OF INVENTION

In order to resolve the foregoing issues, the present invention uses thefollowing means. Firstly, for resolution of the issue 1, an attempt ismade to use, as a capacitor electrode for onchip memory use, a planarstructure with a dielectric film sandwiched between metals, called theMIM (Metal-Insulator-Metal) structure, while utilizing a wiring layer onor above the same LSI for one of the electrodes of it. In addition, highdielectric constant material is employed as an insulator of thecapacitor. Further, let it have the COB (capacitor Over Bitline)structure with capacitors formed above bitlines. Furthermore, electricalcontacts for connection between capacitor electrodes and transistors aretaken from the downside of electrodes as will be described later.

For the issue 2, a two-transistor/one-capacitor (2T1C) cell or2-transistor/2-capacitor (2T2C) cell is used as the memory cell. Inaddition, what is called the VDD precharge scheme or VSS (GND) prechargescheme is employed as a bit-line precharge scheme.

For the issue 3, capacitors for use in the above-noted onchip memory andcapacitors including those for analog circuit use or for powerstabilization use are formed of similar structures and the samematerial. Further, in case the requirements to the capacitors concerningthe thickness of dielectric film and the distance from a substrate arealmost the same, it is also possible to utilize capacitors using thesame wiring layer for a plurality of ones, such as the memory andanalog.

By using the means stated above, it is possible to attain the issues 1to 3. Needles to say, it is obvious that it is possible to use all ofthese means or use part thereof according to need. For example, it islikely that some products mount no the analog circuits; however, even insuch a case, exploiting part of the above-noted means makes it possibleto fabricate at low costs a highly integrated onchip memory withlow-voltage operability on the same LSI as that of the logic circuit.Alternatively, other products require the onchip memory to haveultra-high integration. In such case, it is permissible to use the 1T1Ccell with the COB structure using a MIM structure capacitor with one ofits electrodes made common or “commonized” with a wiring line, such asstated in the above-noted resolving method of the issue 1. In this case,although the low voltage characteristics decrease to less than those of2T cells, it is possible to lessen the size of memory cells. Thus, thisapproach is effective for fulfillment of certain operation voltagerequirements.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a diagram showing a first embodiment of the present invention.

FIG. 2 is a cross-sectional diagram of a semiconductor integratedcircuit in the first embodiment of FIG. 1.

FIG. 3 is a diagram showing a semiconductor memory device in the firstembodiment.

FIG. 4 is a circuit diagram of a memory cell in the first embodiment andwaveform diagrams showing operation waveforms.

FIG. 5 is a diagram showing a layout of memory cells in the firstembodiment.

FIG. 6 is a diagram showing the layout drawing in FIG. 5 whileclassifying it on a per-layer basis.

FIG. 7 is a sectional diagram of the memory cell in FIG. 5.

FIG. 8 is a first modified example showing a layout of the memory cellin FIG. 4.

FIG. 9 is a diagram showing the layout drawing in FIG. 8 whileclassifying it on a per-layer basis.

FIG. 10 is a sectional diagram of the memory cell in FIG. 8.

FIG. 11 is a second modification showing a layout of the memory cell inFIG. 4.

FIG. 12 is a diagram showing the layout drawing in FIG. 11 whileclassifying it on a per-layer basis.

FIG. 13 is a sectional diagram of the memory cell in FIG. 11.

FIG. 14 is a third modification showing a layout of the memory cell inFIG. 4.

FIG. 15 is a diagram showing the layout drawing in FIG. 14 whileclassifying it on a per-layer basis.

FIG. 16 is a sectional diagram of the memory cell in FIG. 14.

FIG. 17 is a sectional diagram of the memory cell in FIG. 14.

FIG. 18 is a third embodiment showing a circuit diagram of the memorycell of FIG. 3 and operation waveforms.

FIG. 19 is a diagram showing a layout of a memory cell in FIG. 18.

FIG. 20 is a diagram showing the layout drawing in FIG. 19 whileclassifying it on a per-layer basis.

FIG. 21 is a sectional diagram of the memory cell in FIG. 19.

FIG. 22 is a modification showing a layout of the memory cell of FIG. 4.

FIG. 23 is a diagram showing the layout drawing in FIG. 22 whileclassifying it on a per-layer basis.

FIG. 24 is a sectional diagram of a memory cell in FIG. 23.

FIG. 25 is a sectional diagram of the memory cell in FIG. 23.

FIG. 26 is a modification showing a layout of the memory cell of FIG.18.

FIG. 27 is a diagram showing the layout drawing in FIG. 26 whileclassifying it on a per-layer basis.

FIG. 28 is a sectional diagram of the memory cell in FIG. 26.

FIG. 29 is a modification showing a layout of the memory cell of FIG.18.

FIG. 30 is a diagram showing the layout drawing in FIG. 29 whileclassifying it on a per-layer basis.

FIG. 31 is a diagram showing the layout drawing in FIG. 29 whileclassifying it on a per-layer basis.

FIG. 32 is a sectional diagram of the memory cell in FIG. 29.

FIG. 33 is a sectional diagram of the memory cell in FIG. 29.

FIG. 34 is a modification showing a layout of the memory cell in FIG.18.

FIG. 35 is a diagram showing the layout drawing in FIG. 34 whileclassifying it on a per-layer basis.

FIG. 36 is a sectional diagram of the memory cell in FIG. 34.

FIG. 37 is a sectional diagram of the memory cell in FIG. 34.

FIG. 38 is a modification of the sectional diagram of capacitors in ananalog unit and a memory unit of FIG. 2.

FIG. 39 is a sixth embodiment showing a semiconductor memory deviceconstituted from memory cells different in structure.

FIG. 40 is a circuit diagram of a 1T1C memory cell in FIG. 39 and adiagram showing a layout.

FIG. 41 is a sectional diagram of the memory cell in FIG. 40.

MODES FOR CARRYING OUT THE INVENTION

It should be noted that the transistors making up each block ofpreferred embodiments are fabricated on a single semiconductor substratesuch as a single-crystalline silicon by known CMOS (complementary MOStransistor) integrated circuit technologies, although not specificallylimited thereto. More specifically, these are fabricated by a processincluding the steps of forming wells and element isolation regions plusan oxide film(s), and thereafter forming gate electrodes and first andsecond semiconductor regions which form source/drain regions. Regardingthe circuit symbols of MOSFET (Metal Oxide Semiconductor Field EffectTransistor), the one with no circle mark added to a gate represents anN-type MOSFET (N MOS), which is distinguished from a P-type MOSFET(PMOS) with a circle mark added to its gate. Hereinafter, MOSFET will besimply called the MOS or MOS transistor. Note that the present inventionis not limited only to the field effect transistors containing an oxidefilm provided between a metal gate and a semiconductor layer and is alsoapplicable to circuits using general FETs, such as MISFET (MetalInsulator Semiconductor Field Effect Transistor) involving a dielectricfilm therebetween.

First Embodiment

FIG. 1 is a diagram showing a semiconductor integrated circuit LSI(referred to as “LSI” hereinafter) which is one embodiment of thepresent invention. FIGS. 2 to 7 show practical embodiments of main partsmaking up the LSI of FIG. 1. FIG. 2 shows a cross-sectional diagram of apart of said LSI. FIG. 3 is an embodiment of a memory unit MEM which isthe embodiment of FIG. 1; FIG. 4 is an embodiment of a memory cell MC inFIG. 3, which shows its circuit diagram and one example of operationwaveforms. FIG. 5 shows a layout drawing of a 2T1C cell which was formedusing a MIM capacitor. FIG. 6 is a diagram indicating the layout of theembodiment of FIG. 5 while classifying it in units of wiring layers. Inaddition, FIG. 7 is a diagram showing a cross-sectional structure of the2T1C cell of FIG. 5. These embodiments will first be explained in thedescription below.

In the embodiment of FIG. 1, there is shown an embodiment of an LSI witha logic unit LOGIC, an analog unit ANALOG and a memory unit MEM mountedtogether on a single chip. The logic unit LOGIC is mainly constitutedfrom NMOS transistors TN0 and TN1, inverters INV0-INV1 made up of CMOScircuits including MOSFETs of first and second conductivity types (Ptype, N type) with their gates connected together and drains coupledtogether, more than one basic digital circuit such as AND circuit, NANDcircuit or the like, and capacitors C0-C1. The logic unit may comprisean arithmetic circuit such as a product-sum circuit and/or a centralprocessing device CPU. The analog unit ANALOG is generally configuredfrom an operational amplifier OAMP, resistors R1-R2 and a capacitor CAP.The memory unit MEM is made up of peripheral circuitry—including acommand controller CMDCTL, word-line decoder XDEC, bitline decoder YDEC,wordline driver WDRV, memory bank BANK, sense amplifiers SA,input/output buffer I/O Buff—and a memory bank BANK. Although detailswill be explained in FIG. 3, the memory bank BANK is comprised of aplurality of sub-arrays SARY. Furthermore, said sub-array SARY consistsessentially of memory cell MC sub-word lines SWL0-SWLn, bit lines BL0 toBLm−1, and bitlines /BL0 to /BLm−1. Note that some of controlsignals—such as address lines, clocks and others being input frombitline drivers and the outside—are eliminated herein for purposes ofavoiding complexities of the drawing.

Moreover, although concretely explaining in FIG. 2 and its followingdiagrams, the embodiment of FIG. 1 is arranged to utilize a planarstructure with a dielectric film sandwiched between metals—namely, theso-called MIM (Metal-Insulator-Metal) structure (referred to as MIMcapacitors hereinafter)—for those capacitors on the same chip, such asthe capacitors used in an on-chip memory, capacitors used in the analogcircuit, and capacitors used for power supply stabilization use. And,one of the capacitor electrodes is also used as a wiring line.Furthermore, a two-transistor/one-capacitor (2T1C) cell or a2-transistor/2-capacitor (2T2C) cell is used as a memory cell MC (notethat the term “2T cell” is used to indicate both 2T1C and 2T2C). Withthese features, it is possible to realize a highly integrated on-chipmemory of low cost with low-voltage operability and also minimizeprocess costs and yield deterioration even in the case of integrationtogether with analog circuitry or else.

FIG. 2 is one embodiment pictorially showing cross-sectional structuresof the logic unit LOGIC, analog unit ANALOG and memory unit MEM inFIG. 1. Although an explanation is given here on the assumption of CMOSstructure, it is obvious that the present invention is also applicableto other structures including the so-called BiCMOS structure with amixture of bipolar and CMOS transistors. In this embodiment, the logicunit LOGIC, analog unit ANALOG and memory unit MEM are formed on asingle P-type silicon substrate P-SUB. A manufacturing method of the LSIof FIG. 1 will be explained along the sectional structure shown in FIG.2. Firstly in the semiconductor substrate P-SUB, a process is performedfor fabricating wells, a dielectric film SiO2 and an element isolationregion STI. Although in FIG. 2 the element isolation region uses STI(Shallow Trench Isolation) for isolation of grooves or trenches,isolation oxide films may be formed through thermal oxidation by LOCOS(Local Oxidation Of Silicon) methods. Well fabrication is performed byinjection of an impurity of the same conductivity type as theconductivity type to be formed. N-well regions NISO1, NISO2, NISO3 areformed within the single P-type silicon substrate P-SUB to haveisland-like shapes; further, N-well regions NW1, NW2, NW3 and P-wellregions PW1, PW2, PW3 are formed in respective regions NISO as shown inthe drawing. The well structure in FIG. 2 is the so-called triple wellstructure, which uses N-well regions NISO1, 2, 3 to isolate the logicunit LOGIC, analog unit ANALOG and memory unit MEM respectively.Whereby, respective regions of the logic unit LOGIC, analog unit ANALOGand memory unit MEM can be electrically isolated so that it becomespossible to avoid mutual interference, thereby enabling them to performstabilized operations. It is also possible to set the potential levelsof N- and P-wells suitable for respective operating voltages. Obviously,in cases where such the triple well structure is unnecessary, simpledesigns may be used, such as a double well structure without provisionof the N-well regions NISO1-3; alternatively, various modifications arepossible if necessary in such a way that only the memory unit MEM oronly the memory unit MEM and analog unit ANALOG is/are isolated byNISO2, 3 or still alternatively two regions are surrounded by the sameNISO region.

Next, perform a process for fabricating respective electrodes of thegates, sources and drains of transistors. In order to reducemanufacturing costs and improve yields, it is desirable to maximallycommonize the transistor fabrication processes of the logic unit LOGIC,analog unit ANALOG and memory unit MEM to thereby simplify the processsteps involved. As will be described later, several options may beconsidered for this process in a way depending upon whether thehigh-speed operability of the transistors in the logic unit LOGIC isgiven higher priority or whether the integration density of thetransistors of memory cells within the memory unit MEM receives higherpriority (for example, several methods are indicated in the collectionof drafts of “1999 VLSI Technology Short Course” issued by IEEE-USA, pp.95 to 103). Here, an explanation is given of a method using theso-called salicide process which lowers by silicidization the electricalresistances of the gates, drains and sources of the logic unit LOGIC.Use of this method is advantageous in two points. One of them lies in anability to realize the high-speed operability of logic circuitry. Theother is that adaptive usage of design resources of logic circuits ismade possible by using the salicide process that is generally used inlogic LSIs. For the design of logic circuits in the logic unit LOGIC,make use of a library of macro cells including basic circuits such asNAND circuits and CPU cores or else. Owing to this, there is anadvantage which follows: as far as logic portions are formed in advanceby using ordinary salicide processes, it is possible, without newlycreating a design library, to employ the design resources which havebeen prepared and standardized for most logic LSIs. Obviously, ifgeneral transistors are used to configure the analog circuit also, thenit is expectable to bring the effect that the presently availablelibrary becomes usable efficiently. It is noted that an example with itsmemory cell unit being not silicidized will be explained below, becausesilicidization of the source and drain electrodes of memory celltransistors results in an increase in leakage current, which possiblyleads to deterioration of the refresh characteristics. However, it isobvious that in cases where such deterioration of the refreshcharacteristics causes no problems, the silicidization by means of asalicide process may be performed for the memory part also, in order tosimplify the fabrication procedure.

A practically implemented manufacturing method will be described below.First performed is a process for fabricating on a dielectric film ofeach part a gate electrode FG made of polysilicon. At the same step, itis also possible to fabricate more than one resistive element that isformed of a polysilicon layer FG in the analog unit ANALOG. This FGlayer is formed by depositing a polycrystalline silicon film and thenpatterning it into a desired shape by photolithography and dry etchingtechniques. Subsequently, use dry etching to remove a dielectric filmSiO2 which covers first and second semiconductor regions for use as thesource/drain regions of a transistor at each part, followed by a processfor doping an impurity into such regions. Form diffusion layers bydoping by ion implantation an N-type impurity such as phosphorus P,arsenic As or the like into P-type wells while ion-implanting intoN-type wells a P-type impurity such as boron B or else. When implantingions of one conductivity type, the other well regions are masked by aphotoresist. This ion implantation step results in fabrication of a PMOStransistor in the N-well region NW1, NW2, NW3 and an NMOS transistor inthe P-well region PW1, PW2, PW3. At this ion implantation step, powerfeed portions for the N- and P-well regions, which are formed ofsemiconductor regions with the concentration being greater than that ofthe wells, are also formed at locations adjacent to the transistors.

Next, a process is performed for fabrication of a side spacer SS on thesidewall of each gate. By anisotropically etching an oxide film that wasdeposited by CVD method, side spacers are formed on the sidewalls ofgate electrodes. Subsequently, perform again the ion implantation at thesource/drain diffusion layers to thereby make the so-called LDD (LightlyDoped Drain) structure. Thereafter, deposit an oxide film on the entiresurface, followed by selective removal of certain portions of the oxidefilm which are subjected to silicidization of the transistor regions ofthe logic unit. At the next salicide step, it becomes possible by theremaining oxide film to eliminate silicidization at those transistorsmaking up the memory cells. Whereby, the source and drain electrodes ofa transistor of the memory cell unit does not experience thesilicidization; thus, it is possible to avoid deterioration of therefresh characteristics stated supra. Obviously, if in the analog unitalso there is a region that the silicidization is undesirable because itincreases the resistance values in FG layers for resistor use and thediffusion layers for resistor use, it is possible to mask it in asimilar way to the memory cell part. Note that in the case of maskingthe transistor of the memory cell part from the salicide process, thegate electrode also remains as polysilicon. Due to this, if the lengthof word lines becomes longer depending on the arrangement of a memorycell array, then the wordlines made of polysilicon become larger inresistance value, resulting in occurrence of a signal delay. This causesa problem in a certain case. In such case, it becomes effective toemploy a hierarchical wordline structure to be later described, therebydesigning so that the length of wordlines formed of gate electrodes doesnot become longer. When it is inevitable to use long polysilicon wiringlines, an attempt is made to employ the so-called shunt structure havingan upper metal wiring layer and a polysilicon wiring line which areconnected together at specified intervals. In the case of a 3D memorycell of the stack type as widely used in general-purpose DRAMs or thelike, a 3D capacitor is present on or above the substrate so that thedistance between a metal wiring line and a gate electrode increasesunintentionally. Due to this, there is a problem that deep contact holesmust be formed in case a wordline is shunted relative to the upper metalwiring line. However, in the present invention, capacitors are planarlyformed at wiring portions as will be described later so that there is anadvantage that it is no longer required to form any deep contact holes.

Next, a salicide process is performed for simultaneous silicidization ofthe gate, source and drain regions of the transistors of the logic unitLOGIC. This process includes the steps of depositing ahigh-melting-point metal film such as a cobalt Co film, tungsten Ta filmor the like by CVD method, sputter method or else; performing thermalprocessing in an inactive gas atmosphere to thereby perform annealing(let the semiconductor surface react with the high-melting-point metalfilm); and removing non-reactants. Although the transistors ofperipheral circuits of the memory unit MEM are such that only an NMOSwithin PW3 is shown in FIG. 2, the transistors for use in the peripheralcircuits are such that both NMOS and PMOS are silicidized.

Note that although the silicidization is selectively performed by usingthe oxide film in the above case, it is also possible to selectivelyperform the silicidization by selectively removing thehigh-melting-point metal film for silicide.

Also note that the memory cell unit may not be masked if the leakagecurrent is at a degree which does not affect the refresh characteristicsof the memory cells as has been stated previously. In case all thetransistors such as the resistors of the memory cell unit and analogunit may not be masked, it is unnecessary to selectively leave anynitride film whereby the process is simplified so that the photomasksrequired decrease in number. Thus it is possible to further reducemanufacturing costs.

Next, perform a wiring line fabrication process. Each wiring line layeris fabricated through the steps of forming an interlayer dielectricfilm, defining contact holes, and forming a contact layer. In thedrawing, broken lines shown above the substrate are used to indicate thepositions of contact layers (V1, V2, . . . , V5) which are comprised ofvia holes or plugs used for connection between metal wiring layers (M1,M2, . . . , M5) and wiring layers thereof. An interlayer dielectric filmis formed between metal wiring layers. MIM capacitors C1, C2, C3 havinglower electrodes, dielectric films and upper electrodes which are formedusing the same layers (processes) respectively are utilized in the logicunit LOGIC, analog unit ANALOG and memory unit MEM, respectively. Thelayer that forms one electrode of MIM is used as a wiring line of aperipheral circuit of the memory unit and/or wiring layers of the analogunit and logic unit. The usability of a capacitor is as follows. Forexample, in the logic unit, a capacitor is provided at a wiring linebeing connected to the power supply to thereby increase theelectrostatic capacitance of the power supply, thus enablingstabilization of the power supply. Obviously it is also possible to usethis in power supply wiring line sections of the analog unit ANALOG andmemory unit MEM. Furthermore, it is possible to apply it to a capacitiveelement of the analog unit ANALOG and/or a memory cell in the memoryunit MEM as will be described later. Although in FIG. 2 the capacitor isprovided in the logic unit while letting the lower electrodes ofcapacitors at respective portions be formed of the same metal wiringlayer, there is a case where capacitors are not always necessary for thelogic unit. In such case, certain ones of the capacitor electrodes ofthe analog unit and memory unit may be formed by the same layer(process) as at least the wiring line used in the logic unit. In priorart 1T1C cells using a 3D capacitor, polycrystalline silicon excellentin heat resisting properties or the like is mainly used as the lowerelectrode; for the upper electrode, a metal having the oxidizationresistance such as TiN or else has been used to form a memory capacitor.Thus, it was difficult to use the metal wiring layer for use in thelogic as the capacitor electrode.

The MIM capacitor of this embodiment is formed by the same wiring layer(process) as the wiring lines used in analog and logic circuits whileutilizing as the lower electrode a wiring layer overlying the thirdlayer of metal wiring layer M3 above the semiconductor substratesurface. Using wiring lines of the wiring layers overlying the bit linesmakes it possible to effectively acquire the capacitor area with respectto the area of a memory cell without receiving the restraints of contactportions for connection between diffusion layers and capacitorelectrodes and the other wiring lines (bitlines). After the step offorming the lower electrode, a dielectric film is formed, followed byfabrication of the upper electrode. At this time the upper electrode isformed in a layer of via holes V3 between the fourth layer of metalwiring layer M4 and the wiring layer M3. When utilizing the wiring layerfor the one electrode of a capacitor in this way, any special processesbecome unnecessary in the formation of one electrode of capacitor.Unlike a capacitor having the 3D structure as in prior artgeneral-purpose DRAMs, the illustrative capacitor has a planar structureso that the diversion of metal wiring layer stated above is readilyachievable. Furthermore, owing to the planar structure, there are meritswhich follow: patterning is easy; and capacitors are can be fabricatedwith good yields. Additionally, examples of the wiring layer utilizableherein are metal wiring lines such as an aluminum wiring line with Al asits principal component, a copper wiring line with Cu as its maincomponent and the like. When using a high dielectric constant materialwith its relative dielectric constant of 7 or more—for example, Si3N4,Al2O3, Ta2O5, (Ba,Sr)TiO3, SrTiO3, Pb(Zr,Ti)O3, SrBi2Ta2O9, et alia—forthe dielectric film, the capacitance per unit area increases, therebyenabling the memory cells to decrease in area. If necessary, a barriermetal such as TiN, TaN or else may be provided at each wiring layer,although not shown in the drawing. In case the heat resistance propertyis not excellent and less than that of Cu wiring lines, it is effectiveto fabricate Ta2O5 by using sputtering methods at a low temperature ofabout 400° C. Regarding the others, it is obvious that a suitable schemeis chosen in accordance with the characteristics of wiring line materialand dielectric film.

As apparent from the foregoing, the present invention offers an abilityto reduce process costs owing to the use of capacitors of a simpleplanar structure. Further, the use of high-dielectric-constant materialmakes it possible to enlarge the MIM capacitor's capacitance value perunit area, thereby enabling the memory cell capacitor to decrease inarea. Thus it is possible to realize a highly integrated memory at lowcosts. Moreover, by utilizing the wiring layer for the electrode of MIMcapacitor, it is possible to fabricate the capacitors of the memory unitMEM, logic unit LOGIC and analog unit ANALOG to have similar structureswhile using the same material. This makes it possible to realize costreduction and improvements in reliability and process yields. Morespecifically, it is possible to accomplish the first and third issues tothereby realize an LSI with the attainability of both the highlyintegrated memory and the process cost reduction. Note here that thecapacitors of the memory unit MEM, logic unit LOGIC and analog unitANALOG can sometimes differ in required capacitance value per unit area.For example, while the memory cells are required to have a high unitcapacitance due to the presence of priority to the area, it isoccasionally considered desirable for the analog unit to have a low unitcapacitance in reply to the requirements of memory cells since anexcessive decrease in size results in an increase in affection of sizevariations. In this case, it is difficult to change the thickness of ahigh dielectric film at the same layer. To avoid this, a capacitorhaving a different unit capacitance may be fabricated in a separatewiring layer.

So far, one embodiment of the process of this invention has beenexplained with reference to FIG. 2. In the above-noted embodiment, astandard salicide process in logic LSIs was used for transistors otherthan those in the memory cell unit. In the salicide process, the gateelectrodes and the source/drain electrodes are exposed and thensubjected to silicidization simultaneously. Due to this, there is aproblem that the process increases in complexity in order to establishthe compatibility with the so-called gate SAC, which fabricatessource/drain contacts in such a manner that these are self-aligned withthe gates while covering the gate electrodes with a nitride film orelse. Although the gate SAC was not used in the above, it is desirablethat the gate SAC be used to lessen the transistor area in case the areaof a diffusion layer portion of lower transistor becomes larger than thearea of a memory cell capacitor. In such case, it becomes effective touse the gate SAC process while using for the gate FG a poly-metalcapable of lowering the resistance in a way independent of thesource/drain silicidization or a polycide gate. The polymetal is the onethat has a barrier metal film, such as a tungsten silicon film, and ametal film made of tungsten or the like which are deposited on apolysilicon film, whereas the polycide is the one with deposition of atungsten silicon film or else on a polysilicon film. Using thesematerials makes it possible to lower the gate electrode resistance,although it is impossible to silicidize the gates due to the gate SAC.Even in this case, it is still possible to silicidize the sources anddrains of the transistors of the logic unit LOGIC. Obviously, in thecase where the retention of memory cells is of anxiety or in the case ofretaining the resistance value like the diffusion layer resistance ofthe analog unit ANALOG, silicidization may be eliminated while maskingsuch part. Additionally, if it is convenient for the resistor using FGlayer of the analog unit ANALOG also to remain as polysilicon, such partmay be masked during fabrication of a polymetal or polycide. When usingthe polymetal or polycide as the gate material in this way, the gate SACis employable. Thus, there is a merit as to the capability to lessen thearea of diffusion layer portions of the memory cells.

Subsequently, the on-chip memory will be explained in detail, followedby an explanation about a practical means for realizing the low-voltageoperability, which is the second issue. FIG. 3 is one embodiment of thememory unit MEM shown in FIG. 1. An address signal that was output froma command controller CMDCTL is input to a wordline decoder XDEC. Adecoded signal is input to wordline drivers WD0-WDn so that a singlemain word line MWL of main wordlines MWL0-MWLn is asserted (selected andset at a different potential level from the other main wordlines). Next,when looking at one sub-array SRAY, this subarray SRAY is configuredfrom a memory array MARY, a local wordline decoder LXDEC, a commonwordline RX, a plurality of precharge circuits PRE, and a plurality ofsense amplifiers SA. A sense amp SA is of the CMOS latch type with twopairs of MISFETs of the first conductivity type and second conductivitytype (P type and N type) being cross-coupled together. Note that as thedrawing becomes complicated, clocks CLK and a common wordline driveralong with precharge circuits of main input/output lines MI/O andcontrol signals thereof are omitted since the drawing becomescomplicated. By an asserted main wordline MWL and common wordline RX,one of the subwordlines SWL making up the memory array MARY is asserted.A plurality of memory cells MC are connected to one subwordline SWL,wherein a very small or “micro” signal is output from a selected memorycell onto a pair of bit lines BL and /BL and is then amplified by asense amp SA. An address signal as output from the command controllerCMDCTL is similarly input to the bitline decoder YDEC, for selectingfrom among the plurality of memory cells MC a memory cell MC to beinput/output. A signal of such memory cell MC is passed through a localinput/output line LI/O and then amplified by a main sense amp MSAwhereby input/output to and from the outside is performed via maininput/output lines MI/O0-MI/Om. Additionally, control signals such as aprecharge control signal ΦPCH, sense-amp control signals ΦSAN, ΦSAP andbitline select signals Y0-Ym are controlled by the command controllerCMDCTL at desired timings.

FIG. 4 is an embodiment of the memory cell MC, i.e. one of the 2T1Ccells in FIGS. 1 and 3, wherein part (a) is a circuit diagram, (b) showsoperation waveforms during reading, and (c) shows operation waveformsduring writing. The memory cell MC consists essentially of two NMOStransistors TN1, TN2 (denoted as TN1, TN2 hereinafter) and a capacitorC0, wherein a source-drain path of TN1 is connected between a first bitline BL and a storage node SN1 which is one electrode of the capacitorC0 while a source-drain path of TN2 is connected between a secondbitline /BL and a storage node SN1 that is the other electrode of thecapacitor C0. Note here that in the explanation below, the storage nodeside of TN1, TN2 is regarded as a source, whereas the side beingconnected to the bitline BL, /BL is indicated as a drain. Additionallythe gates of TN1 and TN2 are connected to a common word line SWL.

A read operation will be explained by using the waveforms shown in FIG.4( a). The explanation below assumes that the voltage swing width of abit line is 0.9V. As will be described later, a 2T1C cell is used as thememory cell; further, the precharge voltage is set at 0.9V to enableoperations at such the low voltage. As in FIG. 4( b), a singlesub-wordline SWL is asserted (selected to take a voltage different fromthat of the other sub-wordlines) in a read cycle, resulting in a microsignal being output to the bitline pair BL, /BL in accordance with theinformation being stored in the cell. After the elapse of a specifiedtime, assert a sense-amp control signal ΦSAN, ΦSAP to activate a senseamp SA for amplification (RD) of a bitline signal. Furthermore, a Ysignal is used to read a signal from the bitline onto local input/outputline LI/O and then output it through a main amp. The data amplified bythe sense amp SA is rewritten (RWT) into the memory cell; thereafter,negate the wordline. Further, assert the precharge control signal ΦPCH,causing the precharge circuit PRE to precharge (PCH) the bitline pairBL, /BL at the same potential (here, 0.9V). As in FIG. 4( c), thesubwordline SWL is asserted during a write operation in a similar way tothe read operation. Subsequently, after sense-amp drive, a bit line isdriven in accordance with write data to thereby write (WR) desired datainto a selected memory cell MC. The above is one example of theoperation waveforms of the illustrative memory cell.

In this embodiment, the 2T1C cell shown in FIG. 4( a) was used as amemory cell in order to enable a low-voltage operation of 1V or less asshown in FIG. 4. The reason why the low-voltage operation becomespossible by use of this cell will be explained while comparing to theoperation principles of a 1T1C cell. The amount of a read signal of anordinary 1T1C cell is represented by:

Vsig=VDD/2*Cs/(Cs+Cd)  (1)

Here, Vsig, VDD, Cs and Cd are the read signal amount, power supplyvoltage, memory cell capacitance, and bitline's parasitic capacitance,respectively. From Equation (1), it can be seen that the read signalamount is proportional to the power supply voltage. It is required todesign the read signal amount so that no operation failures occur bytaking account of possible threshold voltage variations of thetransistors of sense amplifiers and also noises induced tobitlines—generally, about 0.2V or greater is necessary.

From the above-noted Equation (1), it can be seen that the ratio Cd/Csof the bitline parasitic capacitance to the memory cell capacitance isrequired to be set at 1.25 or less in order to permit Vsig to stay at0.2V or more while setting the supply voltage at 0.9V. In normal DRAMs,this ratio is 5 or more or less. Accordingly, in order to provide properoperability with 1V or below, significant reduction of Cd/Cs isnecessary. To reduce Cd/Cs, it is considered to increase the memory cellcapacitance or decrease the bitline parasitic capacitance. However, inorder to increase the memory cell capacitance, it is required toincrease the memory cell area or alternatively to use a capacitor with acomplicated structure such as 3D structure. Thus, this approach is notsuitable for realization of a highly integrated on-chip memory at lowcosts. On the other hand, in order to reduce the bitline parasiticcapacitance, it is necessary to lessen the number of memory cells perbitline, thereby shortening the bitline length. This results in anincrease in number of sense amps in an entirety of the memory array sothat an increase in area resulted therefrom becomes a problem.Especially, if Cd/Cs is made smaller in the way stated above then it isrequired to extremely lessen the number of the memory cells per bitline.Depending on the circumstances, there is a risk that the memory area iskept identical to that in the case of using SRAM cells or,alternatively, the area becomes larger unintentionally.

In contrast, in the 2T1C cell, it is known that the read signal amountis given as:

Vsig=VBL−V/BL=VDD*Cs/(Cs+Cd/2)  (2)

Comparing the right part of Equation (2) to that of Equation (1), it canbe seen that the former is in the form that VDD/2 in Equation (1) isreplaced with VDD, and Cd is replaced by Cd/2. Accordingly, in case thememory cell capacitance and the bitline parasitic capacitance are thesame as each other, even when letting the operation voltage of 2T1C cellbe half of the operation voltage of 1T1C cell, the read signal mount isstill large. Adversely, it can be seen that when calculating Cd/Cs foracquisition of Vsig of more than 0.2V while setting the supply voltageat 0.9V in the same way as the previous case, this value may be equal toor less than 7. This value is a practical value in the viewpoint ofdesign. In this manner, according to this embodiment, even duringlow-voltage operations with 1V or less, it becomes possible to provide asufficient signal amount without unnecessarily dividing bit lines intoportions.

With the technique above, the read signal amount problem was solved.However, in order to enable achievement of operations at 1V or less, itis necessary to cause a sense amplifier for amplification of a signalfrom a memory cell to operate with low voltages. As a method forresolving this, the illustrative embodiment is arranged to use a VDDprecharge scheme (the scheme for causing a precharge circuit to set abitline pair at a first potential level in case a potential differencebetween paired bitlines after potential amplification of the bitlinepair is made equal to a difference between a first potential and asecond potential lower than the first potential). The reason of this isthat if the voltage being applied to a sense amplifier becomes lowerthen its operating speed decreases. In a VDD/2 precharge scheme that isgenerally used in 1T1C cells, the voltage to be applied upon activationof the sense amp is the half of the supply voltage so that the scheme isnot suitable for operations with 1V or below. Consequently, thisembodiment is arranged to use the VDD precharge scheme for precharging abitline at a high level as shown in the waveform of FIG. 4( b). Notethat although similar effects are expectable as to the voltage beingapplied to a sense amp even in a VSS precharge scheme for precharging abitline at a low level (the scheme for causing a precharge circuit toset a bitline pair at the second potential level in case a potentialdifference between paired bitlines after voltage amplification of thebitline pair is made equal to a difference between the first potentialand the second potential lower than the first potential), the case ofthe VDD precharge scheme will be explained here.

Generally, in the case of employing the VDD precharge scheme, the use ofdummy cells is required. In the VDD precharge, when reading a signal ofH level out of a memory cell, a bitline on the VDD-precharged memorycell side does not vary in potential. For this reason, no potentialdifferences take place between paired bitlines while the bitlinespotentially stay at VDD. Thus, it is a must to generate a referencevoltage by a dummy cell and provide a differential voltage by lettingone bitline slightly decrease in potential. Unfortunately, this resultsin occurrence of problems which follow: the reference voltage generatedcan vary due to fluctuations in the manufacture of cell capacitors ofdummy cells; and the parasitic capacitances of bitlines exhibitunbalance due to the presence of dummy cells. Consequently the VDDprecharge scheme is not often employed for most 1T1C cells.

In contrast, as apparent from FIG. 4( b), (c), the 2T1C cell stores an Hlevel and L level at its storage nodes SN1 and SN2 respectively so thatthe signal from a memory cell is output to the complementary bitlines BLand /BL at all times. In other words, since a voltage difference takesplace without fail at the bitlines BL and /BL, no dummy cells arenecessary while making it possible to freely set the precharge voltage.In this manner, the memory cell of this embodiment is capable of freesetup of the precharge voltage. Thus it is possible to employ the VDDprecharge suitable for low-voltage operations.

As apparent from the foregoing, according to this embodiment, theintended memory capable of offering low-voltage operability with 1V orbelow is achievable owing to the capabilities to sufficiently acquirethe read signal amount and to employ the VDD (VSS) precharge withoutusing dummy cells. As a result, it is possible to take from the samepower supply the operating voltage being supplied to the logic unit andthe voltage being supplied to the memory unit without using voltagerise-up/drop-down circuitry. In short, it is possible to permit theoperation voltage being supplied to the circuits making up the logicunit to be equal to the maximum potential level being supplied to abitline and a complementary bitline associated therewith.

Next, a description will be given as to a layout method for realizing byuse of a MIM capacitor the memory cell MC of FIG. 4 with a small area atlow costs, along with an embodiment of a fabrication method thereof.FIG. 5, 6 is a layout diagram, and FIG. 7 shows a fabrication method.

In FIG. 5, respective figures indicate a P-well region (not depicted)formed on a semiconductor substrate, diffusion layers LN which formfirst and second semiconductor regions (drain region and source region)of first and second transistors, gate layers FG forming the gateelectrodes of the first and second transistors and connection thereof, afirst layer of metal wiring layer M1, via holes V0 which are electricalcontacts for connection between diffusion layer LN and wiring layer M1,a second layer of metal wiring layer M2, via holes V1 that are contactsfor connection between wiring layer M1 and wiring layer M2, a thirdlayer of metal wiring layer M3, via holes V2 for use as contacts forconnection between wiring layer M2 and wiring layer M3, and an upperelectrode P0. Note that in FIG. 5 and layout diagrams to be presentedlater, only those layers necessary for indication of the structure of amemory cell are shown, and some layers such as ion implantation layersfor adjustment of transistor threshold voltages are omitted.

The source side of an NMOS transistor TN1 having its diffusion layer LN1and gate layer FG is connected to the upper electrode P0 of capacitor C0through a via hole V0 a, wiring line M1 a, via hole V1 c, wiring line M2c, via hole V2 a and wiring line M3 a so that a storage node SN1 isformed. On the other hand, the source side of an NMOS transistor TN2having its diffusion layer LN2 and gate layer FG is coupled to a wiringline M3 b which is the lower electrode of capacitor C0, through a viahole V0 d, wiring line M1 d, via hole V1 d, wiring line M2 d and viahole V2 b, thereby forming a storage node SN2. The drain of TN1 isconnected to a wiring line M2 a for use as a bit line BL through a viahole V0 b, wiring line M1 b and via hole V1 a. The drain of TN2 iscoupled to a wiring line M2 b that is a bit line /BL through a via holeV0 c, wiring line M1 c and via hole V1 b.

FIGS. 6( a) to (c) show the layout structure of FIG. 5 while dividing itinto groups each including several layers in an easy-to-see way. FIG. 6(a) shows the layout of some major layers covering up to the via holesV0, FIG. 6( b) shows the layout of main layers covering from the firstlayer of metal wiring layer M1 to the second layer of metal wiring layerM2, and FIG. 6( c) shows the layout of further upper layers, whereinfabrication is done in the order of (a), (b) and (c). As shown in FIG.6( a), fabricate a via hole V0 a on the source side of TN1 while forminga via hole V0 b on the drain side thereof. Similarly, fabricate a viahole V0 d on the source side of TN2; form a via hole V0 c on its drainside. These are formed in a way corresponding to respective steps as hasbeen described in the explanation of FIG. 2. As shown in FIG. 6( b), awiring line M1 a is formed from a location above the via hole V0 a to anintermediate or midway portion between the diffusion layer LN1 anddiffusion layer LN2, and is connected to the wiring line M2 c through avia hole V1 c. On the other hand, a wiring line M1 b and via hole V1 aare formed above the via hole V0 b on the drain side and coupled to thewiring line M2 a which is a bitline BL. Similarly a wiring line M1 d isformed from a location above the via hole V0 d to a mid portion betweenthe diffusion layer LN1 and diffusion layer LN2. Further, a via hole V1d is formed on the wiring line M1 d and is coupled to wiring line M2 d.Additionally a wiring line M1 c and via hole V1 b are formed above thevia hole V0 c on the drain side and then coupled to the wiring line M2 bwhich is formed above the diffusion layer LN2 and wiring line M1 d andwhich is a bitline /BL. Moreover, as shown in FIG. 6( c), the wiringline M2 c shown in FIG. 6( b) is connected to wiring line M3 a throughvia hole V2 a and then coupled to the upper electrode P0 of capacitorC0, which resides thereover. In addition, form a via hole V2 b on wiringline M2 d and then connect it to the lower electrode M3 b.

From the above, the source side of TN1 is connected to the upperelectrode P0 through the via hole V0 a, wiring line M1 a, via hole V1 c,wiring line M2 c, via hole V2 a and wiring line M3 a whereby the storagenode SN1 is formed. In contrast, the drain side is connected through thevia hole V0 b, wiring line M1 b and via hole V1 a to the wiring line M2a that is a bitline BL. Similarly the source side of TN2 is connected tothe wiring line M3 b for use as the lower electrode through the via holeV0 d, wiring line M1 d, via hole V1 d, wiring line M2 d and via hole V2b so that the storage node SN2 is formed. The drain side is connectedthrough the via hole V0 c, wiring line M1 c and via hole V1 b to thewiring line M2 b that is a bitline /BL. Note here that respective wiringlines and via holes (M1, M2, M3 and V1, V2) of FIG. 2 are sequentiallyfabricated in the order of from a lower layer to an upper layer at thesame steps as those of corresponding wiring lines and via holes of thelogic unit and analog unit. Additionally, form at the same steps thelower electrodes, dielectric films and upper electrodes of thosecapacitors of the logic unit and analog unit, respectively. At the stepof forming one capacitor electrode, wiring lines are formed within theperipheral circuits of the memory unit, the logic unit and the analogunit.

One feature of the embodiment of the memory cell layout explained inFIGS. 5 and 6 is that a capacitor is disposed above the diffusion layerof a transistor and also that one of its electrodes is formed of awiring layer (although this is M3 in the embodiment, another layeroverlying the M3 is also usable). Whereby, small-area memory cells arerealizable at low process costs. A second feature lies in the method forconnection between a capacitor electrode and transistor diffusion layer.More specifically, the wiring line M1 that extends from one end of eachdiffusion layer LN1, LN2 up to the mid portion of diffusion layer isused to connect between a transistor and capacitor. The connectionbetween the capacitor electrode and the above-noted wiring layer M1 istaken at a portion overlying an element isolation region which is laidout between the semiconductor regions that form the diffusion layers offirst and second NMOS transistors TN1-TN2 so that any via holes forconnection to capacitor electrodes do not exist above such diffusionlayers. Owing to this, it is possible to permit the bitline that isformed of the M2 wiring layer to extend straightly above diffusionlayers without having to detour any diffusion layers. This makes itpossible to allow the distance between first and second bitlines M2 a-M2b to take a value which is smaller than the sum of a minimal distancebetween the semiconductor active regions LN1-LN2 of first and secondNMOS transistors and the lengths of semiconductor active regions LN1-LN2of first and second NMOS transistors in the direction of the layer FGthat form gate electrodes. With this structure, it is possible to makethe area smaller when compared to a layout that takes a structure inwhich the bitline is formed above an element isolation region betweenthe first and second NMOS transistors and those transistors of theirneighboring memory cells. It is also possible to prevent any extraparasitic capacitance from being added to a bitline, since the bitlineis not drawn out and extended to the lateral part of a diffusion layer.In addition, two contact portions V1 a-V1 b for connection between abitline and diffusion layer are structured so that they put a gateelectrode therebetween while the structure of a bitline pair ispoint-symmetrical with respect to the center of a memory cell. Thus, theboth become substantially equal to each other in parasitic capacitanceand in influenceability of coupling noises during operation. With thesefeatures, a stabilized operation is enabled even at low voltages.Furthermore, since the diffusion layers are of simple rectangularshapes, it is possible to lower the parasitic capacitance of thediffusion layers. Moreover, as it is no longer required to excessivelyenlarge the area of a diffusion layer corresponding to a storage node, aleakage current which deteriorates the retention characteristics becomesless. It is also possible to lower the collection efficiency ofelectrical charge carriers occurring within the substrate due to alpharays and neutron radiation. Thus it is possible to enhance theresistance against soft errors also.

Subsequently, cross-sectional structures of the memory cell in FIG. 5, 6are shown in FIG. 7 in order to facilitate the understanding of theconnection relationship explained above. FIG. 7 shows sectionalstructures taken from respective directions a-a′, b-b′, c-c′ and d-d′ inFIG. 5. FIG. 7( a) shows a cross-section a-a′, which indicates that thedrain side of TN1 is connected through a via hole V0 b, wiring line M1 band via hole V1 a to the wiring line M2 a that is a bitline BL. Thesource side of TN1 is connected through via hole V0 a to wiring line M1a. Furthermore, a capacitor C0 which consists of a lower electrode M3 b,dielectric film D0 and upper electrode P0 is formed above the bitlineBL, wherein this bitline is formed in a layer between a wiring layerforming the capacitor electrode and a semiconductor substrate surface.Saying by a term used when classifying 1T1C cell structures, this is astructure equivalent to the COB (Capacitor Over Bitline). With such anarrangement, it is possible to sufficiently retain the capacitor areaeven for a small memory cell area. Thus it is possible to achieve memorycells suitable for low-voltage operations.

Next, FIG. 7( b) shows a sectional view b-b′, which indicates that awiring line M1 a that was drawn out of the source side of TN1 isconnected through a via hole V1 c, wiring line M2 c, via hole V2 a andwiring line M3 a to the upper electrode P0 of capacitor C0. On the otherhand, a wiring line M1 d extended from the source side of TN2 isconnected through via hole V1 d, wiring line M2 d and via hole V2 b tothe wiring line M3 b that is the lower electrode of capacitor C0. Inthis way, this embodiment is arranged so that the dielectric film D0 isholed to take an electrical contact of the upper electrode P0 and wiringline M3 a. More specifically, the contact is taken directly from thedownside of a respective one of the upper electrode P0 and lowerelectrode M3 b, thereby enabling connection to the M1 wiring layer whichwas extended from a diffusion layer. This removes the necessity of anyextra lead lines from the electrodes. Thus it is possible tosufficiently retain the effective capacitor area.

Next, FIG. 7( c) shows a cross-section c-c′, which indicates that thesource of TN1 is connected to the upper electrode P0 through a wiringline M1 a drawn out of the via hole V0 a, a via hole V1 c, wiring lineM2 c, via hole V2 a and wiring line M3 a and further by holing thedielectric film D0. The drain side of TN2 is connected through via holeV0 c, wiring line M1 c and via hole V1 b to the wiring line M2 b that isa bitline /BL. Lastly FIG. 7( d) shows a cross-section d-d′, from whichit can be seen that the source of TN2 is connected to the lowerelectrode M3 b by projecting a wiring line M1 d over the via hole V0 dand by way of via hole V1 d, wiring line M2 d and via hole V2 b. Thedrain of TN1 is coupled to the wiring line M2 a that is a bitlinethrough via hole V0 b, wiring line M1 b and via hole V1 a.

As apparent from the above explanation of FIGS. 5 to 7, the memory celloffers a feature that it uses a capacitor of the planar structure, inaddition to the above-noted features such as utilizing wiring layers aselectrodes. Owing to this, it is possible to significantly reduce thecost for capacitor fabrication. This makes it possible to achieve amemory which is low in process cost. It should be noted that althoughthis embodiment is capable of attaining large capacitor areas as statedsupra, it will possibly happen that the sufficient capacitance is hardlyachievable with the use of an ordinary dielectric film in a waydepending upon the memory cell area required. If this is the case, usingwhat is called the high-dielectric-constant material such as Ta2O5 orequivalents thereof makes it possible to achieve highly integratedmemory cells with active use of the features of this embodiment.

Although the explanation was given by using FIGS. 1 to 7, the presentinvention should not be limited to these ones and may be modified invarious ways within the scope that does not depart from the principlesof the invention. For example, although in FIG. 1 one specific case isexplained which mounts the logic unit LOGIC, analog unit ANALOG andmemory unit MEM together on one LSI, it is obvious that the LSI may beconfigured from only the analog unit ANALOG and memory unit MEM oralternatively made up of only the logic unit LOGIC and memory unit MEM.While in this embodiment the explanation was targeted at 2T cells, 1Tcells of FIG. 40, 41 may alternatively be used. The shape of capacitoralso is not limited to that of this embodiment. The capacitor size mayalso be made smaller than the range of a diffusion layer—that is, lessthan the memory cell area of minimum layout—if necessary; adversely, theformer may be larger than the latter. Additionally it is self-evidentthat the film thickness of dielectric films and the layers formingbitlines and capacitors are also alterable. Note that in logicprocesses, there is a case where the sub-threshold current of atransistor is greater than that of transistors by means ofDRAM-dedicated processes. In such case, when the retentioncharacteristics of memory cells are not sufficient, it is possible tolower the sub-threshold current to thereby improve the retentioncharacteristics, by lowering the gate-source voltage of NMOS of a memorycell, which is attainable by slightly increasing the potential on thelow level side of a bitline during rewriting and writing rather thansetting it at 0V or alternatively by little reducing from 0V thepotential of a wordline at the time of non-selection. Optionally thetransistors making up memory cells MC may be PMOS transistors. In thiscase, it is possible to realize memory cells excellent in soft errorwithstandability, because PMOS transistors are inherently less infunneling length than NMOS transistors. Needless to say, when using PMOStransistors, it is necessary to drive them while using a differentpotential relationship from that of NMOS such as lowering the wordlinepotential level at the time of selection; however, an explanationthereof is eliminated since this is readily understandable matter inview of differences in operation between NMOS and PMOS. Additionallyeven when using PMOS transistors, either the VSS precharge scheme or theVDD precharge scheme is employable. Thus it is possible to achieve theintended memory suitable for low-voltage operations.

Second Embodiment

An explanation will be given of three modified examples of the memorycell layout of FIG. 4( a) of the first embodiment. In the memory celllayout shown in FIGS. 5 to 7, at the capacitor fabrication step, thedielectric film D0 is holed by etching process to thereby connect thewiring layer M3 and upper electrode P0 at an opening or hole of thedielectric film D0. At this time, the dielectric film D0 is exposed to aphotolithography process resulting in unwanted contamination of thesurface of dielectric film D0, which sometimes leads to a decrease incapacitor reliability and yield. In this case, a barrier metal may beused on or above the dielectric film D0 to thereby form capacitors.However, the use of such barrier metal would result in an unintentionalincrease in process cost. If this is the case, the use of a memory celllayout of FIG. 8, 9 and a fabrication method of FIG. 10 makes itpossible to improve the capacitor reliability without using any barriermetal. A first modification shown in these drawings is such that thephotolithography process is performed in the state that upper part ofdielectric film D0 is covered with the upper electrode P0. Whereby, thesurface of dielectric film D0 is hardly contaminated so that thereliability improves.

In FIG. 8, the source side of TN1 is connected to the upper electrode P0of a capacitor C0 through a via hole V0 a, wiring line M1 a, via hole V1c, wiring line M2 c, via hole V2 a, wiring line M3 a, via hole V3 a,wiring line M4 a and via hole V3 b so that a storage node SN1 is formed.On the other hand, the source side of TN2 is connected to a wiring layerM3 b which is the lower electrode of capacitor C0 through a via hole V0d, wiring line M1 d, via hole V1 d, wiring line M2 d and via hole V2 b,thus forming a storage node SN2. The drain of TN1 is connected through avia hole V0 b, wiring line M1 b and via hole V1 a to a wiring line M2 athat is a bitline BL, whereas the drain of TN2 is coupled to a wiringline M2 b that is a bitline /BL through a via hole V0 c, wiring line M1c and via hole V1 b.

FIGS. 9( a) to (d) show the layout structure of FIG. 8 while dividing itinto groups of several layers for purposes of convenience inillustration. FIG. 9( a) shows a layout of some major layers up to thevia holes V0; FIG. 9( b) shows main layers of from a first layer ofmetal wiring layer M1 to a second layer of metal wiring layer M2; FIG.9( c) shows main layers of from the layer of via holes V2 to the upperelectrode P0; and, FIG. 9( d) shows a layout of a further upper layer.Note that since the layers shown in FIG. 9( a), (d) are similar inlayout and connection relationship to those of FIG. 6( a), (b) which isthe first embodiment, an explanation thereof is omitted here. The wiringline M2 c shown in FIG. 9( b) is connected to the wiring line M3 athrough via hole V2 a in a way shown in FIG. 9( c). The via hole V2 b isformed above wiring line M2 d, and then connected to the wiring line M3b that is the lower electrode of capacitor C0. Further, as shown in FIG.9( d), the wiring line M3 a shown in FIG. 9( c) is connected through viahole V3 a to wiring line M4 a while connecting the wiring line M4 a tothe upper electrode P0 of capacitor C0 through via hole V3 b. In thismanner, this modification is arranged to perform the photolithographyprocess while letting the upper electrode P0 cover the dielectric filmD0 so that it is possible to fabricate the capacitor without the risk ofsurface contamination of dielectric film D0.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the sectional structure of the memory cell in FIG.8, 9 is shown in FIG. 10. FIG. 10 shows sectional structures taken fromrespective directions a-a′, b-b′, c-c′ and d-d′ in FIG. 8. FIG. 10( a)shows a cross-section a-a′, form which it can be seen that the drainside of TN1 is connected to a wiring line M2 a that is a bitline BLthrough via hole V0 b, wiring line M1 b and via hole V1 a. The sourceside of TN1 is coupled through a via hole 0 a to wiring line M1 a.

Next, FIG. 10( b) shows a cross-section b-b′, wherein a wiring line M1 athat was drawn out of the source side of TN1 is connected to a wiringline M3 a through a via hole V1 c, wiring line M2 c and via hole V2 a.On the other hand, a wiring line M1 d projected from the source side ofTN2 is coupled to the lower electrode M3 b of capacitor C0 through a viahole V1 d, wiring line M2 d and via hole V2 b.

Note here that in this modification, the dielectric film D0 is formed onthe wiring line M3 a and lower electrode M3 b, followed by fabricationof the upper electrode P0 on dielectric film D0; thereafter, remove byetching the upper electrode P0, dielectric film D0 and an interlayerdielectric film. Using this process, form the via hole V3 a and via holeV3 b at holed portions; then, connect the wiring line M3 a to the upperelectrode P0 through via hole V3 a, wiring line M4 a and via hole V3 b.Since this structure is such that the surface of dielectric film D0 isalways covered with the upper electrode P0 at the photolithography step,it is possible to resolve the problem caused by contamination. Morespecifically, it is possible to form capacitors at good yields withouthaving to use any barrier metal on or above the dielectric film D0,which in turn makes it possible to reduce process costs.

Next, FIG. 10( c) shows a cross-section c-c′, which indicates that thesource of TN1 is connected to a wiring line M4 a by way of a wiring lineM1 a projected from the via hole V0 a, via hole V1 c, wiring line M2 c,via hole V2 a and wiring line M3 a and further through a via hole V3 awhich is defined in the dielectric film D0. The drain side of TN2 iscoupled to the wiring line M2 b that is a bitline /BL through via holeV0 c, wiring line M1 c and via hole V1 b. Lastly FIG. 10( d) shows across-section d-d′, from which it can be seen that the source of TN2 iscoupled to the lower electrode M3 b by extending a wiring line M1 dabove the via hole V0 d and through via hole V1 d, wiring line M2 d andvia hole V2 b. The upper electrode P0 is connected through via hole V3 bto wiring line M4 a. The drain of TN1 is coupled to the wiring line M2 athat is a bitline BL by way of via hole V0 b, wiring line M1 b and viahole V1 a.

As apparent from the above explanations of FIGS. 8 to 10, it is possiblein this modification to fabricate the upper electrode P0 on dielectricfilm D0 and thereafter form the via hole V3 a on wiring line M3 a byholing the dielectric film D0 by etching. More specifically, thedielectric film surface is no longer contaminated due to direct exposureto the photolithography process so that it is possible to fabricate thecapacitor C0 without using any barrier metal, which makes it possible toreduce process steps. Thus it is possible to form capacitors whilereducing costs and also improving yields. Note that the memory cellsexplained in FIGS. 8 to 10 are principally the same as the structuresexplained in FIGS. 5 to 9 in layout and overall shape and also in havinga MIM capacitor using a wiring layer(s). Accordingly, it is obvious thatthe basic features and effects in the modification of FIGS. 5 to 7 areinheritable.

It is also obvious that various changes as to the memory cell layout andfabrication method of this implementation are possible in a similarmanner to the embodiment stated above. Furthermore, it is needless tosay that the MIM capacitor explained in this embodiment is applicable tonot only memory cells but also those for analog and logic use. Owing tothe above-noted features, it is possible to realize an LSI at furtherreduced costs.

In the above-described memory cell layouts shown in FIGS. 5 to 7 andFIGS. 8 to 10, a capacitor is formed by connecting the lower electrodeM3 b onto the via hole V2 b. However, when fabricating the via hole V2b, a recess or the like can take place in some cases. If the lowerelectrode M3 b is formed on or above it, then there is a case where anygood electrical connection is hardly obtainable. It can also happen thata stair step-like difference is created at lower electrode M3 b due tothe influence of such recess, which affects the capacitorcharacteristics. In such case, when using a second modification of thememory cell shown in FIG. 13, it is possible to fabricate the capacitorwhile avoiding the problem noted above.

FIG. 11, 12 shows a layout, and FIG. 13 shows a fabrication method. Amodification shown in these drawings is featured in that a contact istaken out of upper part of the lower electrode and is connected to astorage node. Thus it is possible to form a flat lower electrode.

In FIG. 11, the source side of TN1 is connected to the upper electrodeP0 of capacitor C0 through a via hole V0 a, wiring line M1 a, via holeV1 c, wiring line M2 c, via hole V2 a and wiring line M3 a so that astorage node SN1 is formed. On the other hand, the source side of TN2 isconnected to a wiring line M3 b that is the lower electrode of capacitorC0 through a via hole V0 d, wiring line M1 d, via hole V1 d, wiring lineM2 d, via hole V2 b, wiring line M3 c, via hole V3 b, wiring line M4 aand via hole V3 a, thereby forming a storage node SN2. The drain of TN1is connected to a wiring line M2 a that is a bitline BL through a viahole V0 b, wiring line M1 b and via hole V1 a; the drain of TN2 iscoupled to a wiring line M2 b that is a bitline /BL through a via holeV0 c, wiring line M1 c and via hole V1 b.

FIGS. 12( a) to (c) show the layout structure of FIG. 11 while dividingit into groups of several layers in an easy-to-see way. FIG. 12( a)shows a layout of some major layers covering from a first layer of metalwiring layer M1 up to a second layer of metal wiring layer M2; FIG. 12(b) shows a layout of main layers of from the layer of via holes V2 tothe upper electrode P0; and FIG. 12( c) shows a layout of a furtherupper layer. Note that since the layers underlying the wiring layer M1are similar in layout and connection relationship to those of FIG. 6(a), (b) which is the above-noted embodiment, a drawing and itsexplanation are omitted here.

In this modification, as shown in FIG. 12( a), the wiring line M1 a isformed to range from upper part of via hole V0 a to a midway portion ofdiffusion layer LN1 and diffusion layer LN2 and is connected to wiringline M2 c through via hole V1 c. On the other hand, the wiring line M1 band via hole V1 a are formed on or above the drain-side via hole V0 band connected to the wiring line M2 a that is a bitline BL. Similarly awiring line M1 d is formed, as shown in the drawing, to span from upperpart of via hole V0 d to a mid portion of diffusion layer LN1 anddiffusion layer LN2; further, a via hole V1 d is formed on wiring lineM1 d and connected to wiring line M2 d. Additionally a wiring line M1 cand via hole V1 b are formed on the drain-side via hole V0 c andconnected to the wiring line M2 b for use as a bitline /BL, which wasformed above the diffusion layer LN2 and wiring line M1 d.

As shown in FIG. 12( b), the wiring line M2 c shown in FIG. 12( a) isconnected through a via hole V2 a to wiring line M3 a and furtherconnected to the upper electrode P0 of its overlying capacitor C0. Inaddition, a via hole V2 b is formed on wiring line M2 d and is connectedto wiring line M3 b. Lastly as in FIG. 12( c), the wiring line M3 cshown in FIG. 12( b) is connected to wiring line M4 a through via holeV3 b; further, the wiring line M4 a is connected through via hole V3 ato a wiring line M3 b which is the lower electrode of capacitor C0. Inthis way, this structure is arranged to take a contact from the upperpart of lower electrode M3 b whereby any step-like difference does nottake place at the lower electrode M3 b so that a capacitor with highreliability is realizable.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the cross-sectional structure of the memory cell inFIG. 11, 12 is shown in FIG. 13. FIG. 13 shows sectional structurestaken from respective directions a-a′, b-b′, c-c′ and d-d′ in FIG. 11.FIG. 13( a) shows a cross-section a-a′, which indicates that the wiringline M1 a which was drawn out of the source side of TN1 is connected tothe upper electrode P0 of capacitor C0 through via hole V1 c, wiringline M2 c, via hole V2 a and wiring line M3 a. On the other hand, it isshown that the wiring line M1 d extended from the source side of TN2 isconnected to the wiring line M3 b that is the lower electrode ofcapacitor C0 through via hole V1 d, wiring line M2 d, via hole V2 b,wiring line M3 c, via hole V3 b, wiring line M4 a and via hole V3 a.Next, FIG. 13( b) shows a cross-section b-b′, from which it can be seenthat the drain of TN2 is connected to the wiring line M2 b that is abitline /BL through via hole V0 c, wiring line M1 c and via hole V1 b.The source side of TN2 is coupled through via hole V0 d to wiring lineM1 d. Next, FIG. 13( c) shows a cross-section c-c′, wherein the drain ofTN1 is connected to the wiring line M2 a that is a bitline BL throughvia hole V0 b, wiring line M1 b and via hole V1 a. The source side ofTN2 is connected through via hole V0 d to wiring line M1 d. This drawingalso shows that the dielectric film D0 is holed causing the lowerelectrode M3 b to be coupled through via hole V3 a to wiring line M4 a.Finally, FIG. 13( d) shows a cross-section d-d′, wherein the wiring lineM1 d drawn out of TN2 is connected to wiring line M4 a through via holeV1 d, wiring line M2 d, via hole V2 b, wiring line M3 c and via hole V3b.

As apparent from the explanations of FIGS. 11 to 13, the memory cell ofthis implementation is arranged to take a contact by forming the viahole V3 a on the upper side of lower electrode M3 b. Hence, anystep-like difference is no longer created at the lower electrode so thatthere is an advantage that the stress of capacitor is suppressed to theminimum level. In other words, it is possible to realize memory cellswhile using capacitors with high reliability. Note that it is obviousthat various changes as to the memory cell layout and the fabricationmethod of this implementation are available in a similar way to theprevious embodiment. It is also obvious that the MIM capacitor explainedin this modification is applicable not only to memory cells but also tothose for analog and logic use.

In the memory cell layout shown in FIGS. 11 to 13, when fabricatingcapacitors, the dielectric film D0 is etched to defile holes forconnection between the wiring layer M3 and upper electrode P0 at anopening of dielectric film D0. In this case, the dielectric film D0 issometimes contaminated on its surface for the same reason as that of thefirst modification shown in FIGS. 5 to 7, resulting in a decrease inyield of capacitors. If this is the case, this problem is avoidable byuse of a barrier metal in a similar way to the previous case of FIGS. 5to 7. In cases where the addition of such barrier metal is notdesirable, it is also possible to use a method similar to that of themodification shown in FIGS. 8 to 10 to thereby avoid the above-notedproblem. Hereinafter, such the method will be explained by using a thirdembodiment of the memory cell MC shown in FIGS. 14 to 17.

FIG. 14, 15 shows a layout, and FIGS. 16-17 are cross-sectional diagramsshowing a fabrication method. In the layout shown in these drawings, aphotolithography process is performed after having formed an upperelectrode P0 on dielectric film D0 while retaining the feature of theprevious modification which follows: a contact is taken from the upperpart of a lower electrode to thereby connect it to a storage node. Morespecifically, it is possible to realize a reliability-enhanced capacitorwith no step-like differences at its lower electrode and also possibleto fabricate the capacitor at good yields without having to use anybarrier metal. Thus it is possible to achieve the capacitor with highreliability while simultaneously reducing process costs.

In FIG. 14, the source side of TN1 is connected to a wiring layer M3 bwhich is the lower electrode of a capacitor C0 through a via hole V0 a,wiring line M1 a, via hole V1 c, wiring line M2 c, via hole V2 a, wiringline M3 a, via hole V3 a, wiring line M4 a and via hole V3 b so that astorage node SN1 is formed. In contrast, the source side of TN2 isconnected to the upper electrode P0 of capacitor C0 through a via holeV0 d, wiring line M1 d, via hole V1 d, wiring line M2 d, via hole V2 b,wiring line M3 c, via hole V3 d, wiring line M4 b and via hole V3 c,thereby forming a storage node SN2. The drain of TN1 is connected to awiring line M2 a that is a bitline BL through a via hole V0 b, wiringline M1 b and via hole V1 a. The drain of TN2 is coupled to a wiringline M2 b for use as a bitline /BL through a via hole V0 c, wiring lineM1 c and via hole V1 b.

FIGS. 15( a) to (c) show the layout structure of FIG. 14 while dividingit into groups of several layers in an easy-to-see way. FIG. 15( a)shows a layout of some major layers covering from a first layer of metalwiring layer M1 up to a second layer of metal wiring layer M2; FIG. 15(b) shows a layout of main layers of from the layer of via holes V2 tothe upper electrode P0; and FIG. 15( c) shows a layout of further upperlayers. Note that since the layers underlying the wiring layer M1 aresimilar in layout and connection relationship to those of FIG. 6( a),(b) which is the above-stated embodiment, a drawing and its explanationare omitted here.

In this modification, as shown in FIG. 15( a), the wiring line M1 a isformed to span from the upper part of via hole V0 a to a mid portion ofdiffusion layer LN1 and diffusion layer LN2 and is then connected towiring line M2 c through via hole V1 c. On the other hand, the wiringline M1 b and via hole V1 a are formed on the drain-side via hole V0 band connected to the wiring line M2 a that is a bitline BL. Similarlythe wiring line M1 d is formed from the upper part of via hole V0 d to amid portion of diffusion layers LN1 and LN2; further, the via hole V1 dis formed in wiring line M1 d for connection to wiring line M2 d.Additionally the wiring line M1 c and via hole V1 b are formed on thedrain-side via hole V0 c for connection to the wiring line M2 b for useas a bitline /BL, which was formed to overlie the diffusion layer LN2and wiring line Mid.

Additionally as shown in FIG. 15( b), the wiring line M2 c shown in FIG.15( a) is connected to the wiring line M3 a through a via hole V2 a. Avia hole V2 b is formed on wiring line M2 d and coupled to wiring lineM3 b. Lastly as shown in FIG. 15( c), the wiring line M3 a shown in FIG.15( b) is connected through via hole V3 a to wiring line M4 a; further,the wiring line M4 a is connected through via hole V3 b to a wiring lineM3 b which is the lower electrode of capacitor C0. Similarly the wiringline M3 c shown in FIG. 15( b) is connected through via hole V3 d towiring line M4 b; further, the wiring line M4 b is connected through viahole V3 c to the upper electrode P0 of capacitor C0. In thismodification thus arranged, the surface of dielectric film D0 is alwayscovered with the upper electrode P0 at the photolithography step so thatno contamination problems occur. Furthermore, since the contact is takenby the via hole V3 b from the upper part of lower electrode M3 b, anystep-like difference which causes the stress or else does not take placeat the lower electrode M3 b. From the above features, it is possible toachieve capacitors with high reliability at good yields.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the cross-sectional structure of the memory cell inthe modification of FIG. 14, 15 is shown in FIGS. 16 and 17. FIGS. 16-17show sectional structures taken from respective directions a-a′, b-b′,c-c′, d-d′ and e-e′ in FIG. 14. FIG. 16( a) shows a cross-section a-a′,from which it can be seen that the drain side of TN1 is connectedthrough a via hole V0 b, wiring line M1 b and via hole V1 a to a wiringline M2 a that is a bitline /BL. The source side of TN1 is connectedthrough via hole V0 d to wiring line M1 d. It can also be seen that acapacitor C0 consisting of a lower electrode M3 b, dielectric film D0and upper electrode P0 is formed above a bitline. Next, FIG. 16( b)shows a cross-section b-b′, which indicates that a wiring line M1 awhich was drawn out of the source side of TN1 is connected to the wiringline M3 b that is the lower electrode of capacitor C0 through a via holeV1 c, wiring line M2 c, via hole V2 a, wiring line M3 a, via hole V3 a,wiring line M4 a and via hole V3 b. On the other hand, it shows that awiring line M1 d extended from the source side of TN2 is connected tothe upper electrode P0 of capacitor C0 through a via hole V1 d, wiringline M2 d, via hole V2 b, wiring line M3 c, via hole V3 d, wiring lineM4 b and via hole V3 c. Next, FIG. 17( a) shows a cross-section c-c′,wherein a wiring line M1 a which was drawn out of TN1 is connected towiring line M4 a through via hole V1 c, wiring line M2 c, via hole V2 a,wiring line M3 a and via hole V3 a. Next, FIG. 17( b) shows across-section d-d′, from which it can be seen that the drain of TN2 isconnected to the wiring line M2 b that is a bitline /BL through via holeV0 c, wiring line M1 c and via hole V1 b. The source side of TN1 isconnected through via hole V0 a to wiring line M1 a. This diagramfurther shows that the dielectric film D0 is holed causing lowerelectrode M3 b to be connected to wiring line M4 a through via hole V3b. Lastly FIG. 17( c) shows a cross-section e-e′, wherein the drain ofTN1 is connected through via hole V0 b, wiring line M1 b and via hole V1a to the wiring line M2 a that is a bitline BL. The source side of TN2is coupled through via hole V0 d to wiring line M1 d. The upperelectrode P0 is coupled through via hole V3 c to wiring line M4 b.

As apparent from the above explanation of FIGS. 14 to 17, the memorycell of this implementation is such that the upper electrode P0 isformed on the dielectric film D0 and then the dielectric film D0 isholed by etching to form the via hole V3 b on the lower electrode M3 b.With this technique, it is possible to form the capacitor C0 withoutusing any barrier metals. It is also possible to minimize the stress ofthe capacitor while preventing creation of step-like differences at thelower electrode M3 b. In short, it is possible to realize the memorycell using the capacitor with high reliability while reducing capacitorfabrication process costs. Obviously, various changes as to the memorycell layout and fabrication method are possible in a similar way to theembodiment stated supra. It is also obvious that the MIN capacitor setforth in this embodiment is applicable not only to memory cells but alsoto those for analog use and logic use.

Third Embodiment

Although in the aforesaid embodiment the explanation was given whileaiming at the memory cell made up of two transistors and one capacitor,an explanation will be given of the layout of a memory cell which isstructured from two transistors and two capacitors in the nextembodiment. In case no differences are found between one capacitor andtwo capacitors, handle them as a single carrier storage means. FIG. 18depicts an arrangement with the memory cell MC in FIGS. 1 and 3 beingmodified to 2T2C. FIG. 18( a) is a circuit diagram, (b) shows operationwaveforms during reading, and (c) shows operation waveforms duringwriting. The memory cell MC of this implementation is a 2T2C cell whichconsists essentially of two transistors TN1 and TN2 and two capacitorsC0-C1. The drain of TN1 is connected to a bit line BL, and the source ofTN1 is connected to one electrode of the capacitor C0 and then becomes astorage node SN1. Similarly the drain of TN2 is connected to a bit line/BL; the source of TN2 is coupled to the one electrode of capacitor C1and becomes a storage node SN2. The remaining respective electrodes ofcapacitors C0-C1 are connected to a plate PLT, with the gates of TN1 andTN2 being coupled to a common word line SWL. Although the read and writewaveforms of FIGS. 18( b) and (c) are basically similar to those of 2T1Cso that a detailed explanation is omitted herein, the VDD prechargescheme is used in order to improve low-voltage operations for the samereason as that stated previously. Note that while the waveforms areshown here with the plate PLT being set at VSS, operations are alsoattainable with other potential levels. The 2T2C cell as used in thisembodiment is capable of acquiring a larger signal mount than that of1T1C cells as will be described later. Thus the cell is featured bybeing suitable for low-voltage operations as in 2T1C cells. In addition,since one end of a capacitor becomes the so-called plate electrode, itis possible to connect only the lower electrode of the capacitorelectrodes to the diffusion layer of a transistor while permitting theplate side corresponding to its upper electrode to serve as a commonwiring line. Due to this, there is a merit that the structure is simpleand easy to fabricate when compared to 2T1C cells.

There is given below an explanation of the fact that the use of a 2T2Ccell enables operations with 1V or less such as shown in FIG. 18. It isknown that in the 2T2C cell, the amount of a read signal is given as:

Vsig=VBL−V/BL=VDD*Cs/(Cs+Cd)  (3)

Note that Cd is the parasitic capacitance of bitline BL, /BL. Whencomparing the right part of Equation (3) with that of Equation (1), itcan be seen that VDD/2 in Equation (1) is replaced with VDD. This meansthat the signal amount becomes doubled when compared to 1T1C cells ifthe voltage and capacitance are the same. In other words, it is possibleto attain the same signal amount with a half-reduced voltage. Anotherfeature is that in the 2T1C cell shown in Equation (2), Cd is the halfof Cd/2 so that the signal amount becomes much larger than 2T2C;however, low-voltage operations are attainable even in the 2T2C cell.For example, when calculating CD/CS for acquisition of Vsig of 0.2V ormore while setting the power supply voltage at 0.9V in Equation (3), itcan be seen that it is equal to or less than 3.5. This value is apractical value in design activities. In this way, according to thisembodiment, it becomes possible, even at the time of a low-voltageoperation with 1V or less, to retain a sufficient signal amount withoutunnecessarily dividing the bitlines. Obviously, the feature as to theapplicability of the VDD (VSS) precharge scheme without the use of dummycells is the same as the circumstances in 2T1C cells so that similareffects are obtainable. It is also similar to 2T1C cells that PMOStransistors are used as memory cell transistors to thereby improve thesoft-error withstandability. It should be noted that although the 2T2Ccell of this embodiment is capable of performing low-voltage operationsas stated above, the signal amount under the same condition becomessmaller by a degree corresponding to the term of Cd when compared to2T1C cells. In cases where the voltage is further lowered and/or thesignal amount is required to increase depending upon the conditions ofcapacitances such as Cs and Cd, a larger signal amount is obtainable bydriving the plate potential. More specifically, there is also employablea scheme for writing a signal into a storage node and thereafterapplying a bias to the plate PLT to further increase an H level signalthus written, thereby improving the retention characteristics (regardingthe scheme for applying a bias to plate PLT, this is recited for examplein IEEE Journal of Solid State Circuits, October 1989, at pp. 1206 to1212).

An explanation will next be given of a layout method for using a MIMcapacitor to realize the memory cell of FIG. 18 with high integration atlow costs, along with a fabrication method thereof. FIG. 19, 20 shows a2T2C cell layout, and FIG. 21 shows its fabrication method. In FIG. 19,the source of TN1 is connected to a wiring line M3 a that is the lowerelectrode of a capacitor C0 through a via hole V0 a, wiring line M1 a,via hole V1 c, wiring line M2 c and via hole V2 a so that a storage nodeSN1 is formed. On the other hand, the source side of TN2 is connected toa wiring line M3 b that is the lower electrode of a capacitor C1 througha via hole V0 d, wiring line M1 d, via hole V1 d, wiring line M2 d andvia hole V2 b, thus forming a storage node SN2. The drain of TN1 isconnected to a wiring line M2 a that is a bitline BL through a via holeV0 b, wiring line M1 b and via hole V1 a. The drain of TN2 is coupled toa wiring line M2 b for use as a bitline /BL through a via hole V0 c,wiring line M1 c and via hole V1 b. An upper electrode corresponding tothe plate PLT is formed by a P0 layer as an electrode for common use.Although the wiring line of plate PLT is sharable by not only twocapacitors C0-C1 within one cell but also other cells, the plate PLT(upper electrode P0) may be shared by those memory cells sharing awordline when driving the plate PLT as stated previously.

FIG. 20 shows the layout structure of FIG. 19 while dividing it intogroups of several layers in an easy-to-see way, which indicates somemajor layers covering from a layer of the via holes V2 to the upperelectrode P0. Since the layers underlying a wiring layer M2 are similarin layout and connection relationship to those of FIG. 6( a), (b) whichis the above-noted embodiment, a drawing and its explanation are omittedherein.

In this embodiment, as shown in FIG. 20, the wiring line M2 c thusfabricated is connected through via hole V2 a to the wiring line M3 athat is the lower electrode of capacitor C0. Similarly the wiring lineM2 d thus formed is coupled through via hole V2 b to the wiring line M3b that is the lower electrode of capacitor C1. In this way, thisembodiment is arranged so that connection is done to the lower electrodeof capacitor C0, C1 through a wiring line M1 which is extended from oneend of each diffusion layer LN1, LN2 up to a mid portion of thediffusion layers. This makes it possible to fabricate the bitline BL,/BL above the diffusion layers, thus enabling reduction of the memorycell area.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the cross-sectional structure of the memory cell inFIG. 19, 20 is shown in FIG. 21. FIG. 21 shows sectional structurestaken from respective directions a-a′, b-b′ and c-c′ in FIG. 19. FIG.21( a) shows a cross-section a-a′, from which it can be seen that thedrain of TN1 is connected through via hole V0 b, wiring line M1 b andvia hole V1 a to the wiring line M2 a that is a bitline BL. The sourceside of TN1 is connected through via hole V0 a to wiring line M1 a.Next, FIG. 21( b) shows a cross-section b-b′, which indicates that thewiring line M1 a that was drawn out of the source side of TN1 isconnected to the wiring line M3 a that is the lower electrode ofcapacitor C0 through via hole V1 c, wiring line M2 c and via hole V2 a.On the other hand, it shows that the wiring line M1 d extended from thesource side of TN2 is connected through via hole V1 d, wiring line M2 dand via hole V2 b to the wiring line M3 b that is the lower electrode ofcapacitor C1. Lastly FIG. 21( c) shows a cross-section c-c′, indicatingthat the source of TN1 is connected to the wiring line M3 a that is thelower electrode through the wiring line M1 a extended from via hole V0a, via hole V1 c, wiring line M2 c and via hole V2 a. The drain side ofTN2 is coupled through via hole V0 c, wiring line M1 c and via hole V1 bto wiring line M2 b for use as a bitline /BL. Note that although notspecifically depicted here, the upper electrode P0 of thisimplementation is connected to the plate PLT and is fixed to a specifiedvoltage of Vss, for example.

As apparent from the above explanation of FIGS. 18 to 21, the memorycell of this implementation offers features of using a wiring layer as acapacitor and using a capacitor with the planar structure, in additionto the feature of forming a capacitor above a bitline to thereby enableachievement of a cell capacitance sufficient for low-voltage operations.Thus it is possible to realize a memory low in process costs in asimilar way to the embodiments with 2T1C cells. Although notspecifically explained in this embodiment, it is obvious that theembodiment explained in FIGS. 5 to 17 is applicable to the 2T2C cell ofthis implementation, and that similar effects to those of 2T1C areobtainable in respective schemes. It is also self-evident that thememory cell of this implementation is modifiable in various ways withoutdeparting from the concept thereof, including changes as to circuitoperations such as letting a wordline slightly decrease from 0V in astandby mode, and alterations as to the capacitor structure andfabrication techniques. Furthermore, it is definitely needless to saythat the MIM capacitor of this implementation is applicable not only tomemory cells but also to elements for analog use and logic use. With theabove-noted features, it is possible to achieve an LSI with reducedprocess costs.

Fourth Embodiment

Although in the above embodiments there has been shown the case wheretwo upper and lower metal electrodes are used to form a capacitor tothereby constitute either a 2T1C cell or a 2T2C cell, when theminiaturization progresses resulting in a decrease in memory cell area,it will occasionally happen that the use of only one capacitor makes itimpossible to sufficiently retain the cell capacitance required. If thisis the case, a plurality of MIM structure capacitors are provided in amultiplexed way and connected together in parallel, thereby making itpossible to attain a sufficiently large effective capacitor area evenwhen the memory cell area is small.

An embodiment using 2T1C cells is shown in FIGS. 22 to 25. FIG. 22, 23shows a layout, and FIGS. 24-25 show a fabrication method. Note that aswill be described later, a similar method is applicable to 2T2C cells.In other cells also, such as for example 1T1C cells, the same scheme isemployable in order to increase the capacitance of a capacitor withoutincreasing the area. Optionally, when applying to a capacitor forstabilization of analog circuitry and/or power supply, it is possible toobtain an effect such as a decrease in area with respect to the samecapacitance or an increase in capacitance with the same area.

In these drawings, a feature lies in that a capacitor C0 is formed byusing a wiring line M3 and a layer of via holes V3, and that anothercapacitor C1 is formed above the capacitor C0 by use of a wiring line M4and a layer of via holes V4. By connecting these two capacitors inparallel with each other to make up a 2T1C cell, it is possible toachieve a large cell capacitance without having to increase the memorycell area.

In FIG. 22, the source of TN1 is connected to the upper electrode P1 ofcapacitor C1 through a via hole V0 a, wiring line M1 a, via hole V1 c,wiring line M2 c, via hole V2 a, wiring line M3 a, via hole V3 b andwiring line M4 b; further, its upper electrode P1 is connected through awiring line M4 a and via hole V3 a to the upper electrode P0 ofcapacitor C0 so that a storage node SN1 is formed. On the other hand,the source of TN2 is connected to a wiring line M3 b that is the lowerelectrode of capacitor C0 through a via hole V0 d, wiring line M1 d, viahole V1 d, wiring line M2 d and via hole V2 b; further, the lowerelectrode M3 b is connected through a via hole V3 c to a wiring line M4c that is the lower electrode of capacitor C1, thereby forming a storagenode SN2. The drain of TN1 is connected to a wiring line M2 a that is abitline BL through a via hole V0 b, wiring line M1 b and via hole V1 a.The drain of TN2 is coupled to a wiring line M2 b that is a bitline /BLthrough a via hole V0 c, wiring line M1 c and via hole V1 b.

FIG. 23( a), (b) shows the layout structure of FIG. 22 while dividing itinto groups of several layers in an easy-to-see way. FIG. 23( a) showsthose layers covering from a layer of via holes V2 to the upperelectrode P0; FIG. 23( b) shows some major layers of from a layer of viaholes V3 to the upper electrode P1. Since main layers underlying the viaholes V2 are similar in layout and connection relationship to those ofFIG. 6( a), (b) which is the above-stated embodiment, a drawing and itsexplanation are omitted here.

In this embodiment, as shown in FIG. 23( a), the wiring line M2 c thusfabricated is connected through via hole V2 a to wiring line M3 a.Similarly the wiring line M2 d thus formed is coupled through via holeV2 b to the wiring line M3 b that is the lower electrode of capacitorC0. Next, as shown in FIG. 23( b), the wiring line M3 a shown in FIG.23( a) is connected through via hole V3 b and wiring line M4 b to theupper electrode P1 of capacitor C1. Furthermore, the upper electrode P1is connected through wiring line M4 a and via hole V3 a to the upperelectrode P0 of capacitor C0 shown in FIG. 23( a). The wiring line M3 bthat is the lower electrode shown in FIG. 23( a) is connected throughvia hole V3 c to the wiring line M4 c that is the lower electrode ofcapacitor C1. In this way, this embodiment is arranged so that twocapacitors C0-C1 are connected in parallel to thereby make up a 2T1Ccell. Thus it is possible to sufficiently achieve the cell capacitancerequired for low-voltage operations even when the memory cell area issmall.

Subsequently, in order to make the above-explained connectionrelationship more understandable, the cross-sectional structure of thememory cell in FIG. 22, 23 is shown in FIGS. 24-25. FIG. 24 showssectional structures taken from respective directions a-a′, b-b′ andc-c′ in FIG. 22. FIG. 25 shows sectional structures taken fromrespective directions d-d′ and e-e′ in FIG. 22. FIG. 24( a) shows across-section a-a′, from which it can be seen that the drain of TN1 isconnected through a via hole V0 b, wiring line M1 b and via hole V1 a tothe wiring line M2 a that is a bitline BL. The source side of TN1 iscoupled through via hole V0 a to wiring line M1 a. The upper electrodeP0 of capacitor C0 thus formed is connected through via hole V3 a andwiring line M4 a to the upper electrode P1 of capacitor C1. Next, FIG.24( b) shows a cross-section b-b′, which indicates that the wiring lineM1 a drawn out of the source side of TN1 is connected to the upperelectrode P1 of capacitor C1 through via hole V1 c, wiring line M2 c,via hole V2 a, wiring line M3 a, via hole V3 b and wiring line M4 b. Thewiring line M1 d extended from the source side of TN2 is connected tothe wiring line M3 b that is the lower electrode of capacitor C0 throughvia hole V1 d, wiring line M2 d and via hole V2 b. Next, FIG. 24( c)shows a cross-section c-c′, from which it can be seen that the drain ofTN2 is connected through via hole V0 c, wiring line M1 c and via hole V1b to the wiring line M2 b that is a bitline /BL. The source side of TN2is connected through via hole V0 d to wiring line M1 d. The lowerelectrode M3 b of capacitor C0 which was formed above the bitline isconnected through via hole V3 c to the wiring line M4 c that is thelower electrode of capacitor C1. Next, FIG. 25( a) shows a cross-sectiond-d′, wherein the source of TN1 is connected to the upper electrode P1of capacitor C1 through the wiring line M1 a drawn out of via hole V0 a,via hole V1 c, wiring line M2 c, via hole V2 a, wiring line M3 a, viahole V3 b and wiring line M4 b; further, the upper electrode P1 iscoupled through wiring line M4 a and via hole V3 a to the upperelectrode P0 of capacitor C0. The drain side of TN2 is connected to thewiring line M2 b that is a bitline /BL through via hole V0 c, wiringline M1 c and via hole V1 b. The lower electrode M3 b of capacitor C0 isconnected through via hole V3 c to the lower electrode M4 c of capacitorC1. Lastly FIG. 25( b) shows a cross-section e-e′, wherein the source ofTN2 is connected to the wiring line M3 b that is the lower electrode ofcapacitor C0 through the wiring line M1 d drawn out of via hole V0 d,via hole V1 d, wiring line M2 d and via hole V2 b. The drain side of TN1is connected to the wiring line M2 a that is a bitline BL through viahole V0 b, wiring line M1 b and via hole V1 a.

As apparent from the above explanation of FIGS. 22 to 25, the memorycell of this implementation is such that the capacitor C0 is formed atthe wiring layer M3 and the layer of via holes V3 while forming thecapacitor C1 at the wiring layer M4 and the layer of via holes V4 tothereby provide a parallel connection of two capacitors. Whereby, evenwhen the memory cell capacitor area becomes smaller due tominiaturization, it is possible to sufficiently attain the cellcapacitance required for low-voltage operations. Furthermore, since twocapacitors are disposed above TN1, TN2 in a multiplex fashion, it ispossible to realize a highly integrated memory while using twocapacitors. It should be noted that in the memory cell of thisimplementation, the feature of using a wiring layer as the capacitorelectrode is principally the same as that of the embodiments explainedin FIGS. 5 to 17 so that it is obvious that similar effects to those ofthe embodiments of FIGS. 5 to 17 are obtainable. It is also obvious thatthe memory cell layout method and capacitor fabrication method or thelike of this implementation are modifiable in various ways in a similarway to the embodiments stated supra. Moreover, it is obvious that threecapacitors may be connected in parallel, rather than two capacitors asin this implementation. In such case, it is possible to acquire afurther increased cell capacitance.

Although in FIGS. 22 to 25 there is shown the example which uses themultiplexed capacitors to form a 2T1C cell, the same scheme is alsoapplicable to a case which uses a 2T2C cell shown in FIGS. 26 to 28.

FIG. 26, 27 shows a 2T2C cell layout, and FIG. 28 is a cross-sectionaldiagram showing a fabrication method. In these drawings, a capacitor C0is formed using a wiring line M3 and a layer of via holes V3; then,another capacitor C1 is formed above the capacitor C0 by use of a wiringlayer M4 and a layer of via holes V4. By using these two capacitors tomake up a 2T2C cell, it is possible to sufficiently retain the cellcapacitance required for low-voltage operations without increasing thememory cell area.

In FIG. 26, the source of TN1 is connected to a wiring line M3 a that isthe lower electrode of capacitor C0 through a via hole V0 a, wiring lineM1 a, via hole V1 c, wiring line M2 c and via hole V2 a so that astorage node SN1 is formed. On the other hand, the source of TN2 isconnected to a wiring line M4 a that is the lower electrode of capacitorC1 through a via hole V0 d, wiring line M1 d, via hole V1 d, wiring lineM2 d, via hole V2 b, wiring line M3 b and via hole V3 a, thus forming astorage node SN2. The drain of TN1 is connected through a via hole V0 b,wiring line M1 b and via hole V1 a to a wiring line M2 a that is abitline BL. The drain of TN2 is coupled through a via hole V0 c, wiringline M1 c and via hole V1 b to a wiring line M2 b that is a bitline /BL.

FIG. 27( a), (b) shows the layout structure of FIG. 26 by dividing itinto several layer groups in an easy-to-see way, which indicates in FIG.27( a) some major layers covering from the layer of via holes V2 to theupper electrode P0 while showing in FIG. 23( b) main layers spanningfrom the layer of via holes V3 to the upper electrode P1. As some layersunderlying the via holes V2 are similar in layout and connectionrelationship to those of FIG. 6( a), (b) which is the above-statedembodiment, a drawing and its explanation are omitted here.

In this example, as shown in FIG. 27( a), the wiring line M2 c thusfabricated is connected through a via hole V2 a to the wiring line M3 athat is the lower electrode of capacitor C0. Similarly the wiring lineM2 d thus formed is connected through a via hole V2 b to wiring line M3b. Next, as shown in FIG. 27( b), the wiring line M3 b shown in FIG. 27(a) is connected through via hole V3 a to the wiring line M4 a that isthe lower electrode of capacitor C1. In this way this example isarranged so that two capacitors C0-C1 are laid out in a multiplexfashion. Accordingly, each capacitor can occupy a memory cell regionformed of TN1, TN2. Thus it is possible to provide a sufficiently largeeffective capacitor area.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the cross-sectional structure of the memory cell inFIG. 26, 27 is shown in FIG. 28. FIG. 28 shows sectional structurestaken from respective directions a-a′, b-b′, c-c′ and d-d′ in FIG. 26.FIG. 28( a) shows a cross-section a-a′, from which it can be seen thatthe drain of TN1 is connected through a via hole V0 b, wiring line M1 band via hole V1 a to the wiring line M2 a that is a bitline BL. Thesource side of TN1 is connected through a via hole V0 a to wiring lineM1 a. It can also be seen that the capacitor C0 and capacitor C1 areformed above the bitline. Next, FIG. 28( b) shows a cross-section b-b′,which indicates that a wiring line M1 a drawn out of the source side ofTN1 is connected through a via hole V1 c, wiring line M2 c and via holeV2 a to the wiring line M3 a that is the lower electrode of capacitorC0. On the other hand, a wiring line M1 d extended from the source sideof TN2 is connected through a via hole V1 d, wiring line M2 d, via holeV2 b, wiring line M3 b and via hole V3 a to a wiring line M4 a that isthe lower electrode of capacitor C1. Next, FIG. 28( c) shows across-section c-c′, wherein the source of TN1 is connected to a wiringline M3 a that is the lower electrode of capacitor C0 through a wiringline M1 a drawn out of via hole V0 a, a via hole V1 c, wiring line M2 cand via hole V2 a. The drain side of TN2 is connected through via holeV0 c, wiring line M1 c and via hole V1 b to a wiring line M2 b that is abitline /BL. Lastly FIG. 28( d) shows a cross-section d-d′, wherein thesource of TN2 is connected to a wiring line M4 a that is the lowerelectrode of capacitor C0 through a wiring line M1 d extended from viahole V0 d, a via hole V1 d, wiring line M2 d, via hole V2 b, wiring lineM3 b and via hole V3 a. The drain side of TN1 is connected to the wiringline M2 a that is a bitline BL through a via hole V0 b, wiring line M1 band via hole V1 a.

As apparent from the explanations of FIGS. 26 to 28, the memory cell ofthis implementation is arranged to form the capacitor C0 at the wiringlayer M3 and the layer of via holes V3 while forming the capacitor C1 atthe wiring layer M4 and the layer of via holes V4. Whereby, it ispossible to sufficiently retain the cell capacitance even for a smallmemory cell region, which in turn makes it possible to achieve a memorywith low-voltage operability. In addition, since two capacitors are laidout above a memory cell in a multiplex fashion, it is possible toachieve a highly integrated memory while using two capacitors. It shouldbe noted that in the memory cell of this implementation, the feature ofusing wiring layers as capacitor electrodes is basically the same asthat of the embodiments shown in FIGS. 5 to 17 so that it is obviousthat similar effects to those of the embodiments of FIGS. 5 to 17 areobtainable. It is also obvious that the memory cell layout method andcapacitor fabrication method or the like of this implementation aremodifiable in various ways in a similar way to the embodiments statedsupra.

Although in the embodiment of FIGS. 22 to 28 there was indicated theexample which disposes two capacitors above one memory cell in amultiplex fashion to thereby form either a 2T1C cell or 2T2T cell, thecapacitor multiplexing method may include a technique for using astructure shown in FIGS. 29 to 33 to achieve the memory cell.

FIG. 29, 30, 31 shows a 2T1C cell layout, and FIGS. 32-33 show afabrication method. In these drawings, a capacitor C0 is formed by usinga wiring layer M3 and a layer of via holes V3; then, another capacitorC1 is formed above the capacitor C0 using a wiring layer M4 and a layerof via holes V4. Furthermore, two capacitors are disposed in the regionsoverlying two neighboring memory cells MC0-MC1. By forming twomultiplexed capacitors by use of two cell regions in this way, it ispossible to sufficiently retain the cell capacitance required forlow-voltage operations without having to increase the memory cell area.

In FIG. 29, there are shown the memory cell MC1 that is constituted fromTN1, TN2 and capacitor C0 and the memory cell MC1 made up of TN3, TN4and capacitor C1. Note here that the storage node of memory cell MC0 isdenoted as SN1, SN2, while that of memory cell MC1 is as SN3, SN4.

In the memory cell MC0, the source of TN1 is connected to the upperelectrode P0 of capacitor C0 through a via hole V0 a, wiring line M1 a,via hole V1 c, wiring line M2 c, via hole V2 a and wiring line M3 a sothat the storage node SN1 is formed. On the other hand, the source ofTN2 is connected to a wiring line M3 b that is the lower electrode ofcapacitor C0 through a via hole V0 d, wiring line M1 d, via hole V1 d,wiring line M2 d and via hole V2 b, thus forming the storage node SN2.The drain of TN1 is connected to a wiring line M2 a that is a bitline BLthrough a via hole V0 b, wiring line M1 b and via hole V1 a, whereas thedrain of TN2 is coupled to a wiring line M2 b that is a bitline /BLthrough via hole V0 c, wiring line M1 c and via hole V1 b.

Similarly in the memory cell MC1, the source of TN3 is connected to awiring line M4 a that is the lower electrode of capacitor C1 through avia hole V0 e, wiring line M1 e, via hole V1 g, wiring line M2 e, viahole V2 c, wiring line M3 c and via hole V3 a whereby the storage nodeSN3 is formed. On the other hand, the source of TN4 is connected to theupper electrode P1 of capacitor C1 through a via hole V0 h, wiring lineM1 h, via hole V1 h, wiring line M2 f, via hole V2 d, wiring line M3 d,via hole V3 b and wiring line M4 b, thus forming the storage node SN4.The drain of TN3 is connected to the wiring line M2 a that is a bitlineBL through a via hole V0 f, wiring line M1 f and via hole V1 e. Thedrain of TN4 is coupled to the wiring line M2 b that is a bitline /BLthrough via hole V0 g, wiring line M1 g and via hole V1 f.

FIG. 30, 31 shows the layout structure of FIG. 29 while dividing it intoseveral layer groups in an easy-to-see way, wherein FIG. 30( a) showssome major layers covering up to the via holes V0, FIG. 30( b) showsmain layers covering from the wiring layer M1 to wiring layer M2, FIG.31( a) shows layers of from the layer of via holes V2 to the upperelectrode P0, and FIG. 31( b) shows layers above the layer of via holesV3. Since some layers underlying the via holes V2 are similar in layoutand connection relationship to those of FIG. 6( a), (b) which is theabove-stated embodiment, an explanation of FIG. 30 is omitted herein.

Next, as shown in FIG. 31( a), the wiring line M2 c shown in FIG. 30( b)is connected to the upper electrode P0 of capacitor C0 through a viahole V2 a and wiring line M3 a. A wiring line M2 d is connected throughvia hole V2 b to a wiring line M3 b that is the lower electrode ofcapacitor C0. On the other hand, a wiring line M2 e is connected to awiring line M4 a that is the lower electrode of capacitor C1 through avia hole V2 c, wiring line M3 c and via hole V3 a. A wiring line M2 f iscoupled to the upper electrode P1 of capacitor C1 through a via hole V2d, wiring line M3 d, via hole V3 b and wiring line M4 b. In this way,two capacitors C0-C1 are multiplexed and laid out in this structure.Furthermore, since respective capacitors can occupy the regions of twoneighboring memory cells MC0-MC1 with, it is possible to sufficientlyretain the effective capacitor area.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the cross-sectional memory cell structure in FIG.30, 31 is shown in FIGS. 32-33. FIG. 32 shows sectional structures takenfrom respective directions a-a′ and b-b′ in FIG. 29. FIG. 33 showssectional structures taken from respective directions c-c′, d-d′, e-e′and f-f′ in FIG. 29.

FIG. 32( a) shows a cross-section a-a′, wherein the drain of TN1 isconnected to the wiring line M2 a that is a bitline BL through a viahole V0 b, wiring line M1 b and via hole V1 a. Similarly the drain ofTN3 is connected to the wiring line M2 a that is a bitline BL through avia hole V0 f, wiring line M1 f and via hole V1 e. Additionally thecapacitor C0 and capacitor C1 are formed at mutually different layersover the bitlines. Next, FIG. 32( b) shows a cross-section b-b′, whereina wiring line M1 a drawn out of the source side of TN1 is connected tothe upper electrode P0 of capacitor C0 through a via hole V1 c, wiringline M2 c, via hole V2 a and wiring line M3 a. On the other hand, awiring line M1 d extended from the source side of TN2 is connected to awiring line M3 b that is the lower electrode of capacitor C0 through avia hole V1 d, wiring line M2 d and via hole V2 b.

Similarly, a wiring line M1 e drawn out of the source side of TN3 isconnected to a wiring line M4 a that is the lower electrode of capacitorC1 through a via hole V1 g, wiring line M2 e, via hole V2 c, wiring lineM3 c and via hole V3 a. On the other hand, a wiring line M1 h extendedfrom the source side of TN4 is connected to the upper electrode P1 ofcapacitor C1 through a via hole 1 h, wiring line M2 f, via hole V2 d,wiring line M3 d, via hole V3 b and wiring line M4 b. Next, FIG. 33( a)shows a cross-section c-c′, wherein the source of TN1 is connected tothe upper electrode P0 of capacitor C0 through a wiring line M1 a drawnout of the via hole V0 a, a via hole V1 c, wiring line M2 c, via hole V2a and wiring line M3 a. The drain side of TN2 is coupled to a wiringline M2 b that is a bitline /BL through via hole V0 c, wiring line M1 cand via hole V1 b. Next, FIG. 33( b) shows a cross-section d-d′, whereinthe source of TN2 is connected to a wiring line M3 b that is the lowerelectrode of capacitor C0 through a wiring line M1 d drawn from the viahole V0 d, a via hole V1 d, wiring line M2 d and via hole V2 b. Thedrain of TN1 is coupled to a wiring line M2 a that is a bitline BLthrough via hole V0 b, wiring line M1 b and via hole V1 a.

Next, FIG. 33( c) shows a cross-section e-e′, wherein the source of TN3is connected to a wiring line M4 a that is the lower electrode ofcapacitor C1 through a wiring line M1 e drawn out of via hole V0 e, avia hole V1 g, wiring line M2 e, via hole V2 c, wiring line M3 c and viahole V3 a. The drain side of TN4 is connected to the wiring line M2 bthat is a bitline /BL through a via hole V0 g, wiring line M1 g and viahole V1 f. Lastly FIG. 33( d) shows a cross-section f-f′, wherein thesource of TN4 is connected to the upper electrode P1 of capacitor C1through a wiring line M1 h drawn from via hole V0 h, a via hole V1 h,wiring line M2 f, via hole V2 d, wiring line M3 d, via hole V3 b andwiring line M4 b. The drain side of TN3 is coupled to the wiring line M2a that is a bitline BL through via hole V0 f, wiring line M1 f and viahole V1 e.

As apparent from the above explanations of FIGS. 30 to 33, thisembodiment is such that at the memory cell MC0, the wiring layer M3 andthe layer of via holes V3 are used to form the capacitor C0. In suchevent, the upper part of its neighboring memory cell MC1 also is used tosufficiently enlarge the effective area of the capacitor C0. Similarlythe memory cell MC1 is such that the wiring layer M4 and the layer ofvia holes V4 are used to form the capacitor C1 while also utilizing theupper part of the neighboring memory cell MC0 to sufficiently enlargethe effective area of capacitor C1. With such an arrangement, it ispossible to retain a much larger cell capacitance, thus enablingachievement of low-voltage operations. In addition, by multiplexing thecapacitor C0 and capacitor C1 while using the regions of two memorycells, it is possible to achieve a highly integrated memory withoutincreasing the areas of memory cells. Note here that although in thisembodiment there was shown the example which utilizes the region of aneighboring memory cell in the bitline direction to form a capacitor, itis obvious that the present invention is not limited thereto. It isself-evident that the regions of neighboring memory cells in thewordline direction may be used to form two capacitors. It is alsopermissible to combine this example with the example shown in FIG. 22—insuch case, a much larger cell capacitance is attainable. As apparentfrom the foregoing, the memory cell layout method and capacitorfabrication method or the like of this invention are modifiable invarious ways without departing from the scope of the invention in asimilar way to that of the embodiments stated supra.

Although in FIGS. 30 to 33 the structure is shown which uses the regionsof two neighboring memory cells to multiplex the capacitors to therebyform 2T1C cells, this is also applicable to a case which uses 2T2C cellsshown in FIGS. 34 to 37.

FIG. 34, 35 shows a 2T2C cell layout, and FIGS. 36-37 are sectionaldiagrams showing a fabrication method. In these drawings, a wiring layerM3 and a layer of via holes V3 are used to form capacitors C0-C1,thereby making up a memory cell MC0. Additionally a wiring layer M4 anda layer of via holes V4 are used to form capacitors C2-C3 to therebyconstruct a memory cell MC1. Furthermore, four capacitors are disposedin the regions overlying two neighboring memory cells MC0-MC1. When suchmultiplexed capacitors are formed using the two cell regions, it ispossible to sufficiently retain the cell capacitance required forlow-voltage operations without increasing the areas of such memorycells.

In FIG. 34, there are shown the memory cell MC0 constituted from TN1,TN2, capacitor C0 and capacitor C1 and the memory cell MC1 made up ofTN3, TN4, capacitor C2 and capacitor C3. In the memory cell MC0, thesource of TN1 is connected through a via hole V0 a, wiring line M1 a,via hole V1 c, wiring line M2 c and via hole V2 a to a wiring line M3 athat is the lower electrode of capacitor C0 so that a storage node SN1is formed. On the other hand, the source of TN2 is connected through avia hole V0 d, wiring line Mid, via hole V1 d, wiring line M2 d and viahole V2 b to a wiring line M3 b that is the lower electrode of capacitorC1, thus forming a storage node SN2. The drain of TN1 is connectedthrough a via hole V0 b, wiring line M1 b and via hole V1 a to a wiringline M2 a that is a bitline BL. The drain of TN2 is coupled through avia hole V0 c, wiring line M1 c and via hole V1 b to a wiring line M2 bthat is a bitline /BL.

Similarly in the memory cell MC1, the source of TN3 is connected to awiring line M4 a that is the lower electrode of capacitor C2 through avia hole V0 e, wiring line M1 e, via hole V1 g, wiring line M2 e, viahole V2 c, wiring line M3 c and via hole V3 a so that a storage node SN3is formed. The source of TN4 is connected to a wiring line M4 b that isthe lower electrode of capacitor C3 through a via hole V0 h, wiring lineM1 h, via hole V1 h, wiring line M2 f, via hole V2 d, wiring line M3 dand via hole V3 b, thus forming a storage node SN4. The drain of TN3 isconnected through a via hole V0 f, wiring line M1 f and via hole V1 e toa wiring line M2 a that is a bitline BL. The drain of TN4 is coupledthrough a via hole V0 g, wiring line M1 g and via hole V1 f to a wiringline M2 b that is a bitline /BL.

FIG. 35 shows the layout structure of FIG. 34 while dividing it intoseveral layer groups in an easy-to-see way. FIG. 35( a) shows some majorlayers covering from the via holes V2 to the upper electrodes; FIG. 35(b) shows main layers of from the via holes V3 to the upper electrode P1.The layout of some layers underlying the wiring layer M2 are similar tothat of FIG. 30 and thus are omitted herein.

In this structure, as shown in FIG. 35( a), the wiring line M2 c thusfabricated is connected through the via hole V2 a to the wiring line M3a that is the lower electrode of capacitor C0. Similarly the wiring lineM2 d is coupled through the via hole V2 b to the wiring line M3 b thatis the lower electrode of capacitor C1. Next, the wiring line M2 e isconnected through via hole V2 c to wiring line M3 c. Further, the wiringline M2 f is coupled through via hole V2 d to wiring line M3 d. Next asshown in FIG. 35( b), the wiring line M3 c is connected through via holeV3 a to the wiring line M4 a that is the lower electrode of capacitorC2. Similarly the wiring line M3 d is coupled through via hole V3 b tothe wiring line M4 b that is the lower electrode of capacitor C3. Inthis way this structure is such that the capacitors C0-C1 and capacitorsC2-C3 are laid out in a multiplex fashion. Moreover, since a respectiveone of the capacitor C0, C1 and capacitor C2, C3 can occupy the regionsof two neighboring memory cells MC0-MC1, it is possible to reservesufficiently enlarged effective capacitor areas.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the cross-sectional structure of the memory cellsin FIG. 34, 35 is shown in FIGS. 36-37. FIG. 36 shows sectionalstructures taken from respective directions a-a′ and b-b′ in FIG. 34.FIG. 37 shows sectional structures taken from respective directionsc-c′, d-d′, e-e′ and f-f′ in FIG. 34.

FIG. 36( a) shows a cross-section a-a′, wherein the drain of TN1 isconnected through a via hole V0 b, wiring line M1 b and via hole V1 a toa wiring line M2 a that is a bitline BL. Similarly the drain of TN3 isconnected through a via hole V0 f, wiring line M1 f and via hole V1 e tothe wiring line M2 a that is a bitline BL. The capacitor C0 andcapacitor C2 are formed at mutually different layers above the bitline.Next, FIG. 36( b) shows a cross-section b-b′, wherein a wiring line M1 adrawn out of the source side of TN1 is connected through a via hole V1c, wiring line M2 c and via hole V2 a to the wiring line M3 a that isthe lower electrode of capacitor C0. On the other hand, a wiring line M1d extended from the source side of TN2 is coupled through a via hole V1d, wiring line M2 d and via hole V2 b to the wiring line M3 b that isthe lower electrode of capacitor C1.

Similarly a wiring line M1 e drawn out of the source side of TN3 isconnected through a via hole V1 g, wiring line M2 e, via hole V2 c,wiring line M3 c and via hole V3 a to the wiring line M4 a that is thelower electrode of capacitor C2. A wiring line M1 h extended from thesource side of TN4 is coupled through via hole V1 h, wiring line M2 f,via hole V2 d, wiring line M3 d and via hole V3 b to the wiring line M4b that is the lower electrode of capacitor C3. Next, FIG. 37( a) shows across-section c-c′, wherein the source of TN1 is connected to the wiringline M3 a that is the lower electrode of capacitor C0 through a wiringline M1 a extended from via hole V0 a, a via hole V1 c, wiring line M2 cand via hole V2 a. The drain side of TN2 is connected through via holeV0 c, wiring line M1 c and via hole V1 b to the wiring line M2 b that isa bitline /BL. Next, FIG. 37( b) shows a cross-section d-d′, wherein thesource of TN2 is connected to the wiring line M3 a that is the lowerelectrode of capacitor C1 through a wiring line M1 d drawn out of viahole V0 d, a via hole V1 d, wiring line M2 d and via hole V2 b. Thedrain side of TN1 is connected through via hole V0 b, wiring line M1 band via hole V1 a to the wiring line M2 a that is a bitline BL. NextFIG. 37( c) shows a cross-section e-e′, wherein the source of TN3 isconnected to the wiring line M4 a that is the lower electrode ofcapacitor C2 through a wiring line extended from via hole V0 e, a viahole V1 g, wiring line M2 e, via hole V2 c, wiring line M3 c and viahole V3 a. The drain side of TN4 is coupled through via hole V0 g,wiring line M1 g and via hole V1 f to the wiring line M2 b that is abitline /BL. Lastly FIG. 37( d) shows a cross-section f-f′, wherein thesource of TN4 is connected to the wiring line M4 b that is the lowerelectrode of capacitor C3 through a wiring line M1 h drawn out of viahole V0 h, a via hole V1 h, wiring line M2 f, via hole V2 d, wiring lineM3 d and via hole V3 b. The drain side of TN3 is coupled through viahole V0 f, wiring line M1 f and via hole V1 e to the wiring line M2 athat is a bitline BL.

As apparent from the above explanations of FIGS. 34 to 37, thisimplementation is such that the wiring layer M3 and the layer of viaholes V3 are used to form the capacitors C0, C1 in the memory cell MC0.In this case, the upper part of its neighboring memory cell MC1 also isused to sufficiently enlarge the effective area of the capacitor C0, C1.Similarly the memory cell MC1 is such that the wiring layer M4 and thelayer of via holes V4 are used to form the capacitor C2, C3 whileutilizing the upper part of the neighboring memory cell MC0 tosufficiently enlarge the effective area of capacitor C2, C3. With suchan arrangement, it is possible to retain a further increased cellcapacitance, thus enabling achievement of low-voltage operations. It isalso possible, by using two memory cell regions to dispose a pluralityof capacitors in a multiplex fashion, to achieve a highly integratedmemory without increasing the areas of memory cells. Obviously thecapacitors may also be formed by using the memory cells neighboring inthe bitline direction. Alternatively, it is also permissible to usethose memory cells neighboring in the wordline direction to dispose andmultiplex the capacitors. Still alternatively, this structure may becombined with the structure shown in FIG. 26 to thereby attain a furtherincreased cell capacitance. From the foregoing, it is apparent that thememory cell layout method and capacitor fabrication method or the likeof this invention are alterable in various ways without departing fromthe scope of the invention in a similar way to that of the embodimentsstated supra.

Fifth Embodiment

Although in the aforementioned embodiment the explanation was directedto the case where MIM capacitors are formed in the same layer as shownin FIG. 2, the specifications required for the capacitors might becomelargely different depending upon end-use applications. For instance, arelatively large unit capacitance value is required for memory cells;however, in the analog, there is a case where higher priority is givento being less in voltage dependency rather than the capacitance value.In such case, it is also possible to change the film thickness of adielectric film of a MIM capacitor in a way as will be explained in FIG.38, when the need arises. More specifically, one approach is to makethinner the dielectric film of a capacitor for use in the memory unitMEM to thereby enlarge the unit capacitance value while increasing thefilm thickness of MIM capacitor for the purposes of suppressing thevoltage dependency to a low level in the analog unit ANALOG. At thistime, if dielectric films different in thickness are formed at the samelayer—for example, the layer of via holes V3—then the manufacturingprocess becomes complicated. This would result in decreases inreliability and in production yield. In such case, MIM capacitorsdifferent in film thickness may be formed in different layers as shownin FIG. 38. Using this approach makes it possible to achieve the MIMcapacitors that are the same in electrode material and structure butdifferent in film thickness from each other without reducing thereliability and yield. For example, it is also possible to fabricate acapacitor for memory use in such a way as to form a thin dielectric filmwith a reduced film thickness and an upper electrode at the wiring layerM3 and the layer of via holes V3, and fabricate an analog-use capacitorin such a way as to form its lower electrode in the wiring layer M5while forming a thick dielectric film with an increased film thicknessand an upper electrode in the layer of via holes V5. The wiring layerfor formation of the memory cell capacitor electrode is provided betweenthe wiring layer in which the analog-use capacitor electrode is formedand the semiconductor substrate surface because the analog circuit isoften required to lessen the capacitor's capacitance relative to thesubstrate. Although the logic unit is not shown in the drawing, thewiring lines within logic circuits make use of the wiring layer used toform the lower electrodes of those capacitors within at least analogcircuitry and memory cells.

Sixth Embodiment

In the embodiments above, certain cases have been explained where 2T1Ccells or 2T2C cells are used to realize a memory. As previously stated,according to the present invention, capacitors with the MIM structureare disposed above transistors while specifically designing connectionbetween diffusion layers and the capacitors, thereby enabling shrink ofthe cell area while using two transistors. However, some applicationsrequire an on-chip memory to have a further increased storage capacity.If this is the case, it is also possible to employ the structure of theprevious embodiment for 1T1C cells to thereby realize a highlyintegrated memory. Even in such case, it is possible to reduce processcosts since the overhead with respect to a logic process decreases owingto the use of a wiring line of logic part as one electrode while usingthe MIM structure for a capacitor in a similar way to the embodimentsstated supra. It is also possible to use a capacitor of similarstructure as that of an analog circuit so that this is also suitable forthe case of mounting the analog circuit. Note however that 1T1C cellsare inherently less in signal amount than 2T cells as stated previously.Due to this, a need is sometimes felt to set the supply voltage at ahigher level. This is undesirable in some cases because an increase involtage serves as a disadvantage in terms of power consumption. In suchcase, 2T cells and 1T1C cells are combined together to thereby enableachievement of a highly integrated memory with low power consumption asin an embodiment described below.

A practical embodiment will be explained by using FIGS. 39 to 41. Onefeature of this embodiment is to add as a cache a memory with smallstorage capacity made up of 2T1C cells or 2T2C cells. Two types ofmemories are formed on a single semiconductor chip. Thus it is possibleto realize enhanced performance and low power consumption comparable tothose of 2T cells operable with lower voltages while at the same timeachieving higher integration almost equivalent to 1T1C cells.

In FIG. 39, a cache dynamic memory CDRAM (simply called the CDRAMhereinafter) is arranged so that a cache memory CACHE uses 2T cells andis driven to operate with a low voltage of 0.9V, for example.Additionally 1T1C cells are used for a main memory MAIN. At this time,although higher integration is achievable without a cost increase whendesigning the capacitors of 1T1C cells by using MIM capacitors in asimilar way to 2T cells, it is obvious that if permitted in terms of thecell area then it is permissible to utilize the cells using MOScapacitors, known as planar 1T1C cells; alternatively, 3D cells may beused if allowable in terms of process costs. The main memory MAIN isdesigned to operate with a voltage required for its operation—forexample, 1.5V. While depending upon end-use applications, most cachememories are such that a small storage capacity of several tens ofkilobytes is deemed enough to realize the hit rate of about 90%. Due tothis, when designing the cache memory CACHE to offer low-voltageoperability as in this embodiment, it becomes possible to lower thepower consumption of the memory as a whole. Apparently the effect ofspeed improvements is expectable in this embodiment also in view of thefact that the speed of a small-capacity cache becomes dominant in termsof the speed performance also, in a similar way to general-use caches.In contrast, the main memory which occupies most part of the capacity iscomprised of 1T1C cells which are small in area; thus, it is possible tolessen the overall area. In other words, it is possible to mount amemory of the same area with a larger storage capacity. Consequentlyaccording to this invention, it is possible to achieve the memory havingthe features of both types of cells.

A control method of CDRAM will next be explained using an embodimentshown in FIG. 39. The cache memory CACHE is comprised of a tag memoryTAGMEM and a data memory DATAMEM. The tag memory TAGMEM is made up of aplurality of tag addresses for storage of upper addresses ADD[16:10], aplurality of valid bits V which indicate whether the data correspondingto a stored tag address TAG is valid or invalid, and a plurality ofdirty bits D indicating that the corresponding data was rewritten. Thedata memory DATAMEM has a plurality of blocks corresponding to the tagaddresses TAG, wherein each block has a plurality of line data DATA3 toDATA0.

Externally input to CDRAM are a clock CLK, external address EADDR[16:0],external data EDATA[63:0], address strobe signal ADS# and write enablesignal WE#. The external address EADDR[16:0] thus input is then input toan address buffer ADD BUFF. Here, a mid-level address ADD[9:2] is anentry, which is used to select a cache line to be accessed in the cachememory CACHE. An address that was stored at the tag address TAG of theselected cache line is sent through a tag address bus TADD and theninput to a comparator CMP. The comparator CMP compares an up-leveladdress ADD[16:10] with the tag address TAG and asserts a hit signal HITwhen the both addresses are the same. While valid bit V is valid andwhen a cache controller CACHECTL detects a cache-hit, it asserts a cachewrite enable signal CWE and then reads desired data out of the datamemory DATAMEM, which data is transferred to a data request masterthrough an input/output buffer I/O BUFF. At the time of writing, writethe externally input data into the data memory DATAMEM. Alternatively atthe time of a cache failure, negate the hit signal HIT, causing one MRQof memory request buses to be asserted by an address decoder ADDDEC.This results in desired data being read out of the main memory MAINduring reading or alternatively desired data being written into the mainmemory MAIN during writing.

The control of CDRAM is done in the way stated above. Note that 2T1Ccells and 2T2C cells are dynamic type memories so that the cache memoryCACHE is required to perform refresh operations. Accordingly access fromthe outside is delayed by such refresh operations of the cache memoryCACHE, causing the latency of CDRAM to become larger virtually,resulting in the usability becoming worse. In such case, it is alsopossible to preset the latency of cache memory CACHE at larger values.Additionally in case a failure occurs in access to the cache memoryCACHE, an attempt is made to provide access to the main memory MAIN,which sometimes results in the latency being different between hit andfailure events. In this case also, it is apparent that CDRAM iscontrolled so that the latency is kept constant without regard to hitfailures in a similar way to the above-noted case.

FIGS. 40 and 41 show the arrangement of a memory cell MC used in themain memory MAIN of FIG. 39. The memory cell is a 1T1C cell using a MIMcapacitor. FIG. 40( a) is a circuit diagram, FIG. 40( b), (c), (d), (e)shows a layout, and FIG. 41 is a cross-sectional diagram showing afabrication method of the 1T1C cell of FIG. 40.

In FIG. 40( a), the 1T1C cell is comprised of a TN1 and a capacitor C0,and connected to a sub-word line SWL and bit lines BL and /BL. SN1 is astorage node; VPLT is a plate electrode. Additionally, operationwaveforms are such that well-known ordinary schemes such as VDD/2 schemeor the like are applicable, a detailed explanation of which is omittedherein.

Next, an explanation will be given of a structure which uses a MIMcapacitor to realize the memory cell of FIG. 40( a) while increasing theintegration density at low costs. In FIG. 40( b), the source of TN1 isconnected to a wiring line M3 a that is the lower electrode of capacitorC0 through a via hole V0 b, wiring line M1 b, via hole V1 b, wiring lineM2 c and via hole V2 a. Its drain is connected through a via hole V0 a,wiring line M1 a and via hole V1 a to a wiring line M2 a that is abitline BL. An upper electrode corresponding to the plate PLT is formedby a P0 layer as an electrode for common use.

FIGS. 40( c) to (e) show the layout structure of FIG. 40( b) whiledividing it into several layer groups in an easy-to-see way, wherein (c)shows some major layers underlying the via holes V0, (d) shows mainlayers covering from a wiring layer M1 to wiring layer M2, and (e) showssome layers overlying the via holes V2.

As shown in FIG. 40( c), the via hole V0 a is formed on the drain sideof TN1 while forming the via hole V0 b on the source side. In addition,as shown in FIG. 40( b), the wiring line M1 b is formed to span fromupper part of the via hole V0 b to a mid part between the bitlines BLand /BL, and is connected to the wiring line M2 c through via hole V1 b.On the other hand, the wiring line M1 a and via hole V1 a are formed onthe drain-side via hole V0 a and are connected to the wiring line M2 athat is a bitline BL. The wiring line M2 b indicates a bitline /BL.Furthermore, as shown in FIG. 40( c), the wiring line M2 c thusfabricated is connected through the via hole V2 a to the wiring line M3a that is the lower electrode of capacitor C0. In this way, thisembodiment is arranged to use the MIM capacitor to make up a 1T1C cell.As the capacitor is formed above bitlines and diffusion layers, it ispossible to lessen the memory cell area. In addition, since thecapacitor is of a planar structure and uses a wiring layer as its oneelectrode, it is possible to reduce process costs. Additionally theupper electrode P0 is sharable with another memory cell(s) whereby thememory cell becomes simplified in structure so that there is a merit ofeasy-to-make.

Subsequently, in order to make the above-stated connection relationshipmore understandable, the cross-sectional structure of the memory cell inFIG. 40 is shown in FIG. 41. FIG. 41 shows sectional structures takenfrom respective directions a-a′, b-b′ and c-c′ in FIG. 40( b).

FIG. 41( a) shows a cross-section a-a′, wherein a wiring line M1 b whichwas drawn out of the source side of TN1 is connected through via hole V1b, wiring line M2 c and via hole V2 a to the M3 a that is the lowerelectrode of capacitor C0. FIG. 41( b) shows a cross-section b-b′,wherein the drain of TN1 is connected through via hole V0 a, wiring lineM1 a and via hole V1 a to the wiring line M2 a that is a bitline BL.Lastly FIG. 41( c) shows a cross-section c-c′, wherein the source of TN1is coupled to the wiring line M3 a that is the lower electrode ofcapacitor C0 through the wiring line M1 b extended from via hole V0 b,via hole V1 b, wiring line M2 c and via hole V2 a.

According to the above-stated embodiment of FIGS. 39 to 41, a MIMcapacitor is used to form the 1T1C cell. Using the 1T1C cell for themain memory MAIN makes it possible to highly integrate the CDRAM. It isalso possible to lower the power consumption of CDRAM by using 2T cellsto make up the cache memory CACHE and driving it to perform alow-voltage operation. In short, combining 1T cells and 2T cells makesit possible to achieve a memory having low power consumption and highintegration features.

Although in this embodiment a direct mapping technique was explained asthe cache memory CACHE control method, this invention is not limitedthereto and is modifiable in various ways without departing from thescope and spirit thereof. For example, the cache memory CACHE controlmethod is alterable to use other techniques including, but not limitedto, a set associative scheme and full associative scheme. The writemethod may be designed to use any one of a write-back scheme,write-through schemes, write-allocate scheme, and no-write allocatescheme. For data replacement of the cache memory CACHE, this isachievable by using currently available LRU (Least Recently Used)algorithms. Obviously, the capacity and way number of the cache memoryCACHE and the capacity of main memory MAIN are also modifiable in avariety of ways. Additionally as stated previously, it is possible toreduce process costs since the MIM capacitor for use in a 1T1C cell isformable by the same layer as that of the capacitor of a 2T cell whileenabling commonization of the step of forming the wiring lines of theanalog unit ANALOG and logic unit LOGIC and the step of formingcapacitors in a similar way to the embodiment of 2T cells. It is alsoobvious that various alterations are possible as in the embodimentsstated supra, concerning the techniques for taking contacts out ofcapacitor electrodes, multiplexing MIM capacitors, changing the filmthickness of dielectric films, and forming MIM capacitors for the analogunit ANALOG and those for the memory unit MEM in different layers.

As apparent from the foregoing, main effects of this invention are asfollows. First, it is possible to realize a memory utilizing capacitorsat low costs, by forming memory cells using MIM capacitors with oneelectrode structured from a wiring layer. Second, by forming capacitorsby use of high-dielectric-constant material to provide a COB structurewith the capacitors disposed above bitlines, it is possible to reducethe cell area to thereby enable achievement of a high integrated memory.Third, since the use of 2T1C or 2T2C cells makes it possible to retain alarge amount of read signal, it is possible to achieve a memory withlow-voltage operability. Fourth, using 2T cells and 1T cells incombination makes it possible to achieve a highly integrated memory oflow power consumption. Fifth, commonizing the process steps of formingMIM capacitors in the logic, analog, memory and others makes it possibleto realize a semiconductor integrated circuit with high reliability atlow costs.

INDUSTRIAL APPLICABILITY

The present invention is applicable to an information processingapparatus, in particular, to computer equipment typically includingpersonal computer devices. This information processing apparatus may bethe one having the general-purpose usability or alternatively the one asbuilt therein as part of a control device.

1. A semiconductor integrated circuit device comprising: a semiconductor substrate having a main surface; a first MISFET arranged at an analog circuit forming region of the main surface, wherein the first MISFET includes a source region and a drain region each formed in the semiconductor substrate, a gate insulating film formed on the semiconductor substrate and silicide layers formed on the source region, the drain region and the gate electrode; a second MISFET arranged at a logic circuit forming region of the main surface, wherein the second MISFET includes a source region and a drain region each formed in the semiconductor substrate, a gate insulating film formed on the semiconductor substrate and silicide layers formed on the source region, the drain region and the gate electrode; a first capacitor element having a lower electrode, a first insulating film formed on the lower electrode, and a higher electrode formed on the first insulating film, such that the higher electrode is formed over the semiconductor substrate; a second insulating film formed over the first MISFET, the second MISFET and the first capacitor element; and a second capacitor element arranged at the analog circuit forming region and formed over the second insulating film, wherein the second capacitor element has a lower electrode formed over the second insulating film, a third insulating film formed on the lower electrode, and a higher electrode formed on the third insulating film.
 2. The semiconductor integrated circuit device according to claim 1, wherein the lower electrode of the second capacitor element is formed on the same level layer as a wiring layer.
 3. The semiconductor integrated circuit device according to claim 1, wherein the lower electrode of the first capacitor element is formed on the same level layer as a wiring layer.
 4. The semiconductor integrated circuit device according to claim 1, wherein a thickness of the third insulating film of the second capacitor element is greater than a thickness of the first insulating film of the first capacitor element.
 5. The semiconductor integrated circuit device according to claim 2, wherein the wiring layer is comprised of a copper wiring layer.
 6. The semiconductor integrated circuit device according to claim 1, wherein the first capacitor element is comprised of a MIM capacitor. 